Monte Carlo Study of the Interaction Volume Changes by the Beam Skirt in VP-SEM

• Authors: M. El Azzouzi , L. Khouchaf , A. Achahbar
• Languages of publication: EN

Abstracts

EN

In this work we present a new contribution for tracking the behavior of electron beam in gas and then in material placed in the chamber of a variable pressure scanning electron microscope using Monte Carlo simulation. Firstly our results for width and depth of interaction volume in high vacuum mode are compared and are consistent with those obtained by several relationships present in literature. Carbon and aluminum are considered as examples in order to establish the reliability of our approach and experimental data available from the literature. Then, we compared the evolution of width in both high (Re_{(HV)}) and low (Re_{(LV)}) vacuum modes with enlargement of skirt (R_{s}). The present work demonstrates that the best resolution conditions for energy, pressure and material, is given by R_{s}=Re_{(HV)}. Finally, the energy that must be used to get the best image resolution for given pressure and material is determined.

Keywords

EN

VP-SEM; skirt; interaction volume; high vacuum; low vacuum; Monte Carlo simulation

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2017
• Volume: 132
• Issue: 4
• Pages: 1393-1398

Dates

published

2017-10

received

2017-02-13

(unknown)

2017-10-04

Contributors

author

M. El Azzouzi

• Institut MinesTelecom, Lille University, 941 rue Charles Bourseul, CS10838 Douai, France
• Condensed Matter Group, Department of Physics, Faculty of Sciences, B.P. 2121, Tetouan, Morocco

author

L. Khouchaf

• Institut MinesTelecom, Lille University, 941 rue Charles Bourseul, CS10838 Douai, France

author

A. Achahbar

• Condensed Matter Group, Department of Physics, Faculty of Sciences, B.P. 2121, Tetouan, Morocco

References

• [1] A.N. Farley, J.S. Shah, J. Microsc. 158, 379 (1990), doi: 10.1111/j.1365-2818.1990.tb03010.x
• [2] D.C. Siegee, C. Gilpin, Scan. Microsc. Suppl. 8, 219 (1994)
• [3] G.D. Danilatos, Microchim. Acta 114, 143 (1994), doi: 10.1007/BF01244538
• [4] C. Gilpin, D.C. Siegee, J. Microsc. 179, 28 (1995), doi: 10.1111/j.1365-2818.1995.tb03610.x
• [5] R. Gauvain, Scanning 21, 388 (1999), doi: 10.1002/sca.4950210605
• [6] C. Mathieu, Scan. Microsc. 13, 23 (1999), doi: 10.1007/978-3-7091-7506-4_39
• [7] J.F. Mansfield, Mikrochim. Acta 132, 137 (2000), doi: 10.1007/s006040050054
• [8] L. Khouchaf, J. Verstraete, J. Phys. IV 12, 341 (2002), doi: 10.1051/jp4:20020242
• [9] L. Khouchaf, J. Verstraete, J. Phys. IV 118, 237 (2004), doi: 10.1051/jp4:2004118028
• [10] L. Khouchaf, F. Boinski, Vacuum 81, 599 (2007), doi: 10.1016/j.vacuum.2006.08.001
• [11] L. Khouchaf, C. Mathieu, A. Kadoun, Vacuum 86, 62 (2011), doi: 10.1016/j.vacuum.2011.04.014
• [12] E. Dohene, Scanning 19, 75(1997), doi: 10.1002/sca.4950190203
• [13] S.A. Wight, Scanning 23, 320 (2001)
• [14] C. Arnoult, J. Di Martino, L. Khouchaf, V. Toniazzo, D. Ruch, Micron 42, 877 (2011), doi: 10.1016/j.micron.2011.06.004
• [15] W. Słówko, M. Krysztof, Acta. Phys. Pol. A 120, 23 (2011), doi: 10.12693/APhysPolA.120.23
• [16] A. Zoukel, L. Khouchaf, C. Arnoult, J.Di. Martino, D. Ruch, Micron 46, 12 (2013), doi: 10.1016/j.micron.2014.06.009
• [17] T. Everhart, P. Hoff, J. Appl. Phys. 42, 5837 (1971), doi: 10.1063/1.1660019
• [18] J.I. Goldstein, J.L. Costley, G.W. Lorimer, S.J.B. Reed, Scan. Electr. Microsc. 1, 315 (1977), doi: 10.1007/978-1-4613-0491-3
• [19] K. Kanaya, S. Okayam, J. Phys. D Appl. Phys. 5, 43 (1972), doi: 10.1088/0022-3727/5/1/308
• [20] P.J. Potts, A Handbook of Silicate Rock Analysis, Springer, Dordrecht 1987, doi: 10.1007/978-94-015-3988-3
• [21] D.B. Wittry, D.F. Kyser, J. Appl. Phys. 38, 375 (1967), doi: 10.1063/1.1708984
• [22] D.C. Joy, S. Luo, Scanning 11, 176 (1989)
• [23] G.D. Danilatos, Foundations of Environmental Scanning Electron Microscopy. Advances in Electronics and Electron Physics, Academic Press, Boston 1988
• [24] G.D. Danilatos, Micron 45, 1 (2013), doi: 10.1016/j.micron.2012.06.001
• [25] D.C. Joy, Scan. Microsc. 5, 329 (1991), doi: 10.1111/j.1365-2818.1991.tb03095
• [26] D.E. Newbury, H. Yakowitz, in: Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scaning Electron Microscopy, Eds. K.F.J. Heinrich, D.E. Newbury, H. Yakowitz, NBS Special Publication No. 460, 1976
• [27] H.E. Bishop, in Ref. [26], p. 5
• [28] L. Curgenven, P. Duncumb, Tube Investments Research Labs Report, 303 (1971)
• [29] G. Love, M.G.C. Cox, V.D. Scott, J. Phys. D Appl. Phys. 10, 7 (1977), doi: 10.1088/0022-3727/10/1/002
• [30] H. Hunger, L. Kűchler, Physica Status Solidi A 56, K45 (1979)
• [31] O. Mansour, K. Aidaoui, A. Kadoun, L. Khouchaf, C. Mathieu, Vacuum 84, 458 (2010), doi: 10.1016/j.vacuum.2009.09.004

Identifiers

DOI

10.12693/APhysPolA.132.1393