EN
Research of the effect of structure on composition and physicomechanical properties of transition metals diboride films deposited by RF-magnetron sputtering was carried out. It was shown that there is a wide range of different structures, from amorphous to nanocrystalline one with 1-40 nm nanocrystallite sizes in the case of transition metals diboride films. The correlation between the structure, composition, and physicomechanical properties of transition metals diboride films was established.