Study of Magnetic Micro-Ellipses by Cantilever Sensor

• Authors: K. Sečianska , J. Šoltýs , V. Cambel
• Languages of publication: EN

Abstracts

EN

In this paper, we propose a method for prototyping cantilever sensors by means of a modification of commercial atomic force microscopy cantilevers, using electron beam lithography and focused ion beam milling. To overcome obstacles with resist coating related to spin-coating of nonplanar 3D substrates, in this case of free-standing cantilevers, we propose a modified method based on spin-coating technique. An auxiliary atomic force microscopy chip was inserted below the cantilever to quasi-planarize the surface during spin-coating of electron beam resist. Magnetic micro-ellipses were prepared at the free-end of the cantilever by electron beam lithography. We propose a design of a cantilever sensor for the study of magnetic coupling between two cantilevers, prepared by focused ion beam milling. In ideal case, the coupling could be detected by a shift in resonance peaks. Attractive and repulsive forces between magnetic structures were shown by magnetic force microscopy.

Keywords

EN

85.70.Ay; 85.85.+j; 81.16.Nd

Discipline

• 85.85.+j: Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
• 85.70.Ay: Magnetic device characterization, design, and modeling
• 81.16.Nd: Micro- and nanolithography

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2017
• Volume: 131
• Issue: 4
• Pages: 833-835

Dates

published

2017-04

Contributors

author

K. Sečianska

• Institute of Electrical Engineering, SAS, Dúbravská cesta 9, 841 04 Bratislava, Slovakia

author

J. Šoltýs

• Institute of Electrical Engineering, SAS, Dúbravská cesta 9, 841 04 Bratislava, Slovakia

author

V. Cambel

• Institute of Electrical Engineering, SAS, Dúbravská cesta 9, 841 04 Bratislava, Slovakia

References

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Identifiers

DOI

10.12693/APhysPolA.131.833