A Study on Discharge Characteristics by Using MF and RF Power in Remote Dielectric Barrier Discharge

• Authors: D. Kim , Y. Shim , H. Kim , J. Han
• Languages of publication: EN

Abstracts

EN

We have developed an atmospheric pressure plasma apparatus of remote dielectric barrier discharge (RDBD) applicable for a large area. We have systematically studied the characteristics of medium frequency (MF, 40 kHz) and radio frequency (RF, 13.56 MHz) discharge using an optical emission spectroscope. Nitrogen (N₂) and argon (Ar) gases were used in the MF and RF discharge excitation, respectively, in a mixture with clean dry air (CDA). The peak of oxygen radical (O*₂) appears at 259.3 nm when the RDBD is employed. Furthermore, intensive peaks are observed at gas ratios of N₂:CDA=100:1 in MF excitation and at gas ratios of Ar:CDA=70:0.5 in RF discharge excitation. On the other hand, the contact angle shows about 5° in PET samples after the RDBD treatment using the RF and MF discharge excitation. Surface analyses of polyethylene terephthalate (PET) samples were carried out using an atomic force microscope and X-ray photoelectron spectroscope.

Keywords

EN

52.77.Bn

Discipline

• 52.77.Bn: Etching and cleaning(see also 81.65.Cf Surface cleaning, etching, patterning in surface treatments)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2016
• Volume: 129
• Issue: 4
• Pages: 707-710

Dates

published

2016-04

Contributors

author

D. Kim

• Geniatech Inc., Room 810, Hanlla Sigma Valley, 545 Dunchun-daero, Jungwon-gu, Seongnam-si, Gyeonggi-do, South Korea
• CAPST, Sungkyunkwan University, 300 ChunChun-dong, Jangan-gu, Suwon 440-746, South Korea

author

Y. Shim

• Geniatech Inc., Room 810, Hanlla Sigma Valley, 545 Dunchun-daero, Jungwon-gu, Seongnam-si, Gyeonggi-do, South Korea

author

H. Kim

• KIST, Center for Spintronics, Hwarangno 14-gil 5, Seongbuk gu, Seoul 136-791, South Korea

author

J. Han

• CAPST, Sungkyunkwan University, 300 ChunChun-dong, Jangan-gu, Suwon 440-746, South Korea

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Identifiers

DOI

10.12693/APhysPolA.129.707