Investigation of Gold Nanolayer Properties Using X-Ray Reflectometry and Spectroscopic Ellipsometry Methods

• Authors: I. Stabrawa , D. Banaś , K. Dworecki , A. Kubala-Kukuś , J. Braziewicz , U. Majewska , J. Wudarczyk-Moćko , M. Pajek , S. Góźdź
• Languages of publication: EN

Abstracts

EN

X-ray reflectometry and spectroscopic ellipsometry methods were applied for determination of physical properties of gold nonolayers. The nanolayers were prepared by sputtering of gold on different substrates: borosilicate glass, polished crystalline quartz and crystalline silicon. With X-ray reflectometry technique roughness of the substrates and density, thickness and roughness of gold layers were determined. The results showed decrease in density of the gold layers due to their nanometer thickness and that roughness of the underlayer affects roughness of the gold layer. In addition, thicknesses of the gold layers measured with spectroscopic ellipsometry turned out to be in agreement, within the experimental uncertainty, with results of the X-ray reflectometry method.

Keywords

EN

61.05.cm; 62.23.St; 68.55.-a; 81.07.-b

Discipline

• 61.05.cm: X-ray reflectometry (surfaces, interfaces, films)
• 81.07.-b: Nanoscale materials and structures: fabrication and characterization(for structure of nanoscale materials, see 61.46.-w; for nanostructured materials in electrochemistry, see 82.45.Yz; see also 62.23.-c Structural classes of nanoscale systems in mechanical properties of condensed matter)
• 62.23.St: Complex nanostructures, including patterned or assembled structures
• 68.55.-a: Thin film structure and morphology(for methods of thin film deposition, film growth and epitaxy, see 81.15.-z)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2016
• Volume: 129
• Issue: 2
• Pages: 233-236

Dates

published

2016-02

Contributors

author

I. Stabrawa

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland

author

D. Banaś

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland
• Holycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland

author

K. Dworecki

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland

author

A. Kubala-Kukuś

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland
• Holycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland

author

J. Braziewicz

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland
• Holycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland

author

U. Majewska

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland
• Holycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland

author

J. Wudarczyk-Moćko

• Holycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland

author

M. Pajek

• Institute of Physics, Jan Kochanowski University, Świętokrzyska 15, 25-406 Kielce, Poland

author

S. Góźdź

• Holycross Cancer Center, S. Artwińskiego 3, 25-734 Kielce, Poland
• Institute of Public Health, Jan Kochanowski University, al. IX Wieków Kielc 19, 25-317 Kielce, Poland

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Identifiers

DOI

10.12693/APhysPolA.129.233