The Metalorganic Vapour Phase Epitaxy Growth of A^{III}B^{V} Heterostructures Observed by Reflection Anisotropy Spectroscopy

• Authors: M. Zíková , A. Hospodková , J. Pangrác , J. Vyskočil , E. Hulicius , J. Oswald , P. Komninou , J. Kioseoglou
• Languages of publication: EN

Abstracts

EN

Reflectance anisotropy spectroscopy is a useful technique used for in situ observation of the metalorganic vapour phase epitaxy growth, because it does not require vacuum in the reaction chamber. With this method we are able to observe the quantum dot growth, the incorporation of indium or antimony atoms in the layer or the monolayer growth of GaAs. We can also estimate the amount of InAs needed for the quantum dot formation, the time necessary for the quantum dot growth or reveal the unintended growth of InAs quantum dots from large dissolved InAs objects.

Keywords

EN

81.15.Gh; 81.07.Ta; 78.67.Hc; 78.55.Cr

Discipline

• 78.55.Cr: III-V semiconductors
• 78.67.Hc: Quantum dots
• 81.15.Gh: Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)(for chemistry of MOCVD, see 82.33.Ya in physical chemistry and chemical physics)
• 81.07.Ta: Quantum dots

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2016
• Volume: 129
• Issue: 1a
• Pages: A-75-A-78

Dates

published

2016-01

Contributors

author

M. Zíková

• Institute of Physics, Czech Academy of Sciences, v.v.i., Cukrovarnická 10, Prague 6, Czech Republic
• FNSPE at Czech Technical University in Prague, Zikova 1903/4, Prague 6, Czech Republic

author

A. Hospodková

• Institute of Physics, Czech Academy of Sciences, v.v.i., Cukrovarnická 10, Prague 6, Czech Republic

author

J. Pangrác

• Institute of Physics, Czech Academy of Sciences, v.v.i., Cukrovarnická 10, Prague 6, Czech Republic

author

J. Vyskočil

• Institute of Physics, Czech Academy of Sciences, v.v.i., Cukrovarnická 10, Prague 6, Czech Republic

author

E. Hulicius

• Institute of Physics, Czech Academy of Sciences, v.v.i., Cukrovarnická 10, Prague 6, Czech Republic

author

J. Oswald

• Institute of Physics, Czech Academy of Sciences, v.v.i., Cukrovarnická 10, Prague 6, Czech Republic

author

P. Komninou

• Department of Physics, Aristotle University of Thessaloniki, Thessaloniki, Greece

author

J. Kioseoglou

• Department of Physics, Aristotle University of Thessaloniki, Thessaloniki, Greece

References

• [1] D.E. Aspnes, A.A. Studna, Phys. Rev. Lett. 54, 1956 (1985), doi: 10.1103/PhysRevLett.54.1956
• [2] D.E. Aspnes, J. Vac. Sci. Technol. B 3, 1498 (1985), doi: 10.1116/1.582974
• [3] P. Hazdra, J. Voves, J. Oswald, K. Kuldová, A. Hospodková, E. Hulicius, J. Pangrác, Microelectr. J. 39, 1070 (2008), doi: 10.1016/j.mejo.2007.06.005
• [4] A. Hospodková, J. Pangrác, J. Vyskočil, M. Zíková, J. Oswald, Ph. Komninou, E. Hulicius, J. Cryst. Growth 414, 156 (2015), doi: 10.1016/j.jcrysgro.2014.10.026
• [5] A.L. Schofield, C.I. Smith, V.R. Kearns, D.S. Martin, T. Farrell, P. Weightman, R.L. Williams, J. Phys. D Appl. Phys. 44, 335302 (2011), doi: 10.1088/0022-3727/44/33/335302
• [6] W. Richter, Reflexions-Anisotropy Spectroscopy (RAS) http://physik.tu-berlin.de/institute/IFFP/richter/new/research/method_ras.shtml (2016, January 5)

Identifiers

DOI

10.12693/APhysPolA.129.A-75