Synthesis of PbTiO₃ Thin Films by Annealing Multilayer Oxide Structures in Vacuum

• Authors: A. Iljinas , V. Stankus
• Languages of publication: EN

Abstracts

EN

This article presents investigation of syntheses of perovskite PbTiO₃ thin films by using reactive magnetron layer-by-layer deposition on Si (100) substrate and post-annealing in air and vacuum (p=5×10^{-3} Pa). The film stoichiometry was accurately controlled by the deposition of individual layers with the required ( ≈1 nm) thickness, using the substrate periodic moving over targets. Deposited thin films were annealed in air and in vacuum at 670°C and 770°C for 1 h, respectively. The morphological, structural, and chemical properties of thin films deposited at 300°C substrate temperature and post-annealed thin films using either conventional annealing and thermal annealing in vacuum at different temperatures were investigated and compared between. X-ray diffraction measurements of thin films annealed in air show formed crystalline perovskite PbTiO₃ phase with tetragonality c/a=1.047. The crystallite size of oxidized films depends on the substrate temperature. The structure of post annealed in vacuum thin films strongly depends on Pb/Ti atomic ratio. It was observed that the best structure and morphology forms when atomic ratio of Pb/Ti was 0.80. Pseudocubic phase of lead titanate forms with sufficiently low tetragonality at 670°C temperature.

Keywords

EN

81.15.Cd; 68.55.-a

Discipline

• 81.15.Cd: Deposition by sputtering
• 68.55.-a: Thin film structure and morphology(for methods of thin film deposition, film growth and epitaxy, see 81.15.-z)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2016
• Volume: 129
• Issue: 1
• Pages: 121-124

Dates

published

2016-01

received

2015-01-25

(unknown)

2015-09-30

Contributors

author

A. Iljinas

• Departament of Physics, Kaunas University of Technology, Student ku 50, LT-51368, Kaunas, Lithuania Department of Technology, Kaunas University of Technology, Nemuno 33, LT-37164 Panevėr v zys, Lithuania

author

V. Stankus

• Departament of Physics, Kaunas University of Technology, Student ku 50, LT-51368, Kaunas, Lithuania Department of Technology, Kaunas University of Technology, Nemuno 33, LT-37164 Panevėr v zys, Lithuania

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Identifiers

DOI

10.12693/APhysPolA.129.121