Synthesis of PbTiO₃ Thin Films by Annealing Multilayer Oxide Structures in Vacuum

Iljinas, A.; Stankus, V.

doi:10.12693/APhysPolA.129.121

Journal

Acta Physica Polonica A

2016 | 129 | 1 | 121-124

Article title

Synthesis of PbTiO₃ Thin Films by Annealing Multilayer Oxide Structures in Vacuum

Authors

A. Iljinas , V. Stankus

Content

Full texts:

http://przyrbwn.icm.edu.pl/APP/PDF/129/a129z1p24.pdf [remote]

Title variants

Languages of publication

Abstracts

This article presents investigation of syntheses of perovskite PbTiO₃ thin films by using reactive magnetron layer-by-layer deposition on Si (100) substrate and post-annealing in air and vacuum (p=5×10^{-3} Pa). The film stoichiometry was accurately controlled by the deposition of individual layers with the required ( ≈1 nm) thickness, using the substrate periodic moving over targets. Deposited thin films were annealed in air and in vacuum at 670°C and 770°C for 1 h, respectively. The morphological, structural, and chemical properties of thin films deposited at 300°C substrate temperature and post-annealed thin films using either conventional annealing and thermal annealing in vacuum at different temperatures were investigated and compared between. X-ray diffraction measurements of thin films annealed in air show formed crystalline perovskite PbTiO₃ phase with tetragonality c/a=1.047. The crystallite size of oxidized films depends on the substrate temperature. The structure of post annealed in vacuum thin films strongly depends on Pb/Ti atomic ratio. It was observed that the best structure and morphology forms when atomic ratio of Pb/Ti was 0.80. Pseudocubic phase of lead titanate forms with sufficiently low tetragonality at 670°C temperature.

Keywords

81.15.Cd 68.55.-a

Discipline

Publisher

Institute of Physics, Polish Academy of Sciences

Journal

Acta Physica Polonica A

Year

2016

Volume

129

Issue

Pages

121-124

Physical description

Dates

published

2016-01

received

2015-01-25

(unknown)

2015-09-30

Contributors

author

A. Iljinas

Departament of Physics, Kaunas University of Technology, Student ku 50, LT-51368, Kaunas, Lithuania Department of Technology, Kaunas University of Technology, Nemuno 33, LT-37164 Panevėr v zys, Lithuania

author

V. Stankus

Departament of Physics, Kaunas University of Technology, Student ku 50, LT-51368, Kaunas, Lithuania Department of Technology, Kaunas University of Technology, Nemuno 33, LT-37164 Panevėr v zys, Lithuania

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Document Type

Publication order reference

Identifiers

DOI

10.12693/APhysPolA.129.121

YADDA identifier

bwmeta1.element.bwnjournal-article-appv129n124kz