Ion Beam Induced Darkening in Tetrahedral Amorphous Carbon Thin Films

• Authors: M. Sandulov , M. Berova , T. Tsvetkova , J. Zuk
• Languages of publication: EN

Abstracts

EN

The samples of thin film (d ≈ 40 nm) tetrahedral amorphous carbon (ta-C), deposited by the filtered cathodic vacuum arc have been implanted with N⁺ at a fluence of 3×10¹⁴ cm¯² and ion energy E=20 keV. The induced structural modification of the implanted material results in a considerable change of its optical properties, best manifested by a significant shift of the optical absorption edge to lower photon energies as obtained from optical transmission measurements. This shift is accompanied by a considerable increase of the absorption coefficient (photodarkening effect) in the measured wavelength range (350÷2500 nm). These effects could be attributed to both the additional defect introduction and the increased graphitization, as confirmed by the X-ray photoelectron spectroscopy measurements. The optical contrast thus obtained (between implanted and unimplanted film materials) could be made use of in the area of high-density optical data storage using the focused ion beams.

Keywords

EN

81.05.U-   68.55.Ln   42.70.Ln  

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2015
• Volume: 128
• Issue: 5
• Pages: 953-956

Dates

published

2015-11

References

• [1] D.R. McKenzie, D. Muller, B.A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991), doi: 10.1103/PhysRevLett.67.773
• [2] P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, J. Koskinen, Phys. Rev. B 48, 4777 (1993), doi: 10.1103/PhysRevB.48.4777
• [3] T.A. Friedmann, K.F. McCarty, J.C. Barbour, M.P. Siegal, D.C. Dibble, Appl. Phys. Lett. 68, 1643 (1996), doi: 10.1063/1.115891
• [4] Y. Lifshitz, S.R. Kasi, J.W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989), doi: 10.1103/PhysRevLett.62.1290
• [5] S.R.P. Silva, S. Xu, B.K. Tay, H.S. Tan, H.J. Scheibe, M. Chowalla, W.I. Milne, Thin Solid Films 290-291, 317 (1996), doi: 10.1016/S0040-6090%2896%2909182-1
• [6] V.S. Veerasamy, J. Yuan, G. Amaratunga, W.I. Milne, K.W.R. Gilkes, M. Weiler, L.M. Brown, Phys. Rev. B 48, 17954 (1993), doi: 10.1103/PhysRevB.48.17954
• [7] J. Robertson, Prog. Solid State Chem. 21, 199 (1991), doi: 10.1016/0079-6786%2891%2990002-H
• [8] S. Xu, D. Flynn, B.K. Tay, S. Prawer, K.W. Nugent, S.R.P. Silva, Y. Lifshitz, W.I. Milne, Philos. Mag. B 76, 351 (1997), doi: 10.1080/01418639708241099
• [9] B. Ruttensperger, G. Krötz, G. Müller, G. Derst, S. Kalbitzer, J. Non-Cryst. Solids 137-138, 635 (1991), doi: 10.1016/S0022-3093%2805%2980198-X
• [10] G. Müller, Nucl. Instrum. Methods Phys. Res. B 80-81, 957 (1993), doi: 10.1016/0168-583X%2893%2990716-J
• [11] S. Kalbitzer, Nucl. Instrum. Methods Phys. Res. B 218, 343 (2004), doi: 10.1016/S1359-0286%2802%2900122-5
• [12] T. Tsvetkova, in: Beam Processing of Advanced Materials, Eds. J. Singh, S. Copley, J. Mazumder, ASM International, Metals Park 1996, p. 207
• [13] T. Tsvetkova, S. Takahashi, A. Zayats, P. Dawson, R. Turner, L. Bischoff, O. Angelov, D. Dimova-Malinovska, Vacuum 79, 94 (2005), doi: 10.1016/j.vacuum.2005.02.002
• [14] T. Tsvetkova, S. Takahashi, A. Zayats, P. Dawson, R. Turner, L. Bischoff, O. Angelov, D. Dimova-Malinovska, Vacuum 79, 100 (2005), doi: 10.1016/j.vacuum.2005.02.001
• [15] S. Takahashi, P. Dawson, A.V. Zayats, L. Bischoff, O. Angelov, D. Dimova-Malinovska, T. Tsvetkova, P.D. Townsend, J. Phys. D Appl. Phys. 40, 7492 (2007), doi: 10.1088/0022-3727/40/23/036
• [16] T. Tsvetkova, P. Sellin, R. Carius, D. Dimova-Malinovska, O. Angelov, J. Optoelectron. Adv. Mater. 9, 375 (2007)
• [17] J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Matter, Vol. 1, Pergamon, New York 1985
• [18] F. Abeles, M. Theye, Surf. Sci. 5, 325 (1966), doi: 10.1016/0039-6028%2866%2990031-8
• [19] W. Press, S. Teukolsky, W. Veterling, Numeric Recipes in C, Cambridge University Press, 1992, p. 408
• [20] Handbook of X-ray and Ultraviolet Photoelectron Spectroscopy, Ed. D. Briggs, Heyden and Son, London 1977
• [21] Y. Taki, O. Takai, Thin Solid Films 316, 45 (1998), doi: 10.1016/S0040-6090%2898%2900386-1
• [22] T.Y. Leung, W.F. Man, P.K. Lim, W.C. Chan, F. Gaspari, S. Zukotynski, J. Non-Cryst. Solids 254, 156 (1999), doi: 10.1016/S0022-3093%2899%2900388-9
• [23] J.F. Moulder, W.F. Stickle, P.E. Sobol, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer, Prairie, MN 1992, p. 225

Identifiers

DOI

10.12693/APhysPolA.128.953