Investigation of NbN and Nb-Si-N Coatings Deposited by Magnetron Sputtering

• Authors: V. Ivashchenko , P. Scrynskyy , O. Lytvyn , V. Rogoz , O. Sobol , A. Kuzmenko , H. Komsta , C. Karvat
• Languages of publication: EN

Abstracts

EN

NbN and Nb-Si-N films were deposited by magnetron sputtering the Nb and Si targets on silicon wafers at various bias voltages, Uₛ. The deposited films were annealed to establish their thermal stability. The films were investigated by atomic force microscope, X-ray diffraction, X-ray photoelectron spectroscopy and nanoindentation. The NbN films were nanostructured, and the Nb-Si-N films had a nanocomposite structure, and represented an aggregation of δ-NbNₓ nanocrystallites embedded into the amorphous Si₃N₄ tissue (nc-δ-NbNₓ/a-Si₃N₄).

Keywords

EN

61.05.C-; 61.05.cp; 68.37.Ps; 61.05.js

Discipline

• 61.05.js: X-ray photoelectron diffraction
• 61.05.cp: X-ray diffraction
• 68.37.Ps: Atomic force microscopy (AFM)
• 61.05.C-: X-ray diffraction and scattering(for x-ray diffractometers, see 07.85.Jy; for x-ray studies of crystal defects, see 61.72.Dd, Ff)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2015
• Volume: 128
• Issue: 5
• Pages: 949-952

Dates

published

2015-11

Contributors

author

V. Ivashchenko

• Institute for Problems of Material Science, NASU, Krzhyzhanovsky Str. 3, 03680 Kiev - 142, Ukraine

author

P. Scrynskyy

• Institute for Problems of Material Science, NASU, Krzhyzhanovsky Str. 3, 03680 Kiev - 142, Ukraine

author

O. Lytvyn

• Institute of Semiconductor Physics, NASU, Nauky Pr. 41, 03028 Kyiv, Ukraine

author

V. Rogoz

• Sumy State University, Rimsky-Korsakov Str. 2, 40000, Sumy, Ukraine

author

O. Sobol

• National Technical University "Kharkiv Polytechnic Institute", Frunze Str. 21, 61002, Kharkov, Ukraine

author

A. Kuzmenko

• Kursk State Technical University, Center for collective use "High Tech", 305040, October 50 Str. 94, Kursk, Russia

author

H. Komsta

• Institute of Transport, Combustion Engines and Ecology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland

author

C. Karvat

• Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland

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Identifiers

DOI

10.12693/APhysPolA.128.949