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2015 | 128 | 5 | 949-952
Article title

Investigation of NbN and Nb-Si-N Coatings Deposited by Magnetron Sputtering

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EN
Abstracts
EN
NbN and Nb-Si-N films were deposited by magnetron sputtering the Nb and Si targets on silicon wafers at various bias voltages, Uₛ. The deposited films were annealed to establish their thermal stability. The films were investigated by atomic force microscope, X-ray diffraction, X-ray photoelectron spectroscopy and nanoindentation. The NbN films were nanostructured, and the Nb-Si-N films had a nanocomposite structure, and represented an aggregation of δ-NbNₓ nanocrystallites embedded into the amorphous Si₃N₄ tissue (nc-δ-NbNₓ/a-Si₃N₄).
Keywords
Contributors
  • Institute for Problems of Material Science, NASU, Krzhyzhanovsky Str. 3, 03680 Kiev - 142, Ukraine
author
  • Institute for Problems of Material Science, NASU, Krzhyzhanovsky Str. 3, 03680 Kiev - 142, Ukraine
author
  • Institute of Semiconductor Physics, NASU, Nauky Pr. 41, 03028 Kyiv, Ukraine
author
  • Sumy State University, Rimsky-Korsakov Str. 2, 40000, Sumy, Ukraine
author
  • National Technical University "Kharkiv Polytechnic Institute", Frunze Str. 21, 61002, Kharkov, Ukraine
author
  • Kursk State Technical University, Center for collective use "High Tech", 305040, October 50 Str. 94, Kursk, Russia
author
  • Institute of Transport, Combustion Engines and Ecology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland
author
  • Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland
References
  • [1] A.D. Pogrebnjak, A.G. Ponomarev, A.P. Shpak, Phys. Usp. 55, 270 (2012), doi: 10.3367/UFNe.0182.201203d.0287
  • [2] A.D. Pogrebnjak, V.M. Beresnev, Nanocoatings, Nanosystems, Nanotechnologies, Bentham Sci. Pub., Sharjah 2012, doi: 10.2174/97816080541691120101
  • [3] A.D. Pogrebnjak, V. M. Beresnev, A. A. Demianenko, Phys. Solid State. 54, 1882 (2012), doi: 10.1134/S1063783412090247
  • [4] R. Krause-Rehberg, A.D. Pogrebnyak, O.V. Sobol', Phys. of Metals and Metallogr. 114, 672 (2013), doi: 10.1134/S0031918X13080061
  • [5] A.D. Pogrebnjak, Yu.A. Kravchenko, S.B. Kislitsyn, Surface and Coatings Technology 201, 2621 (2006), doi: 10.1016/j.surfcoat.2006.05.018
  • [6] A.D. Pogrebnjak, S. Bratushka, V.I. Boyko, Nucl. Instr. Meth. 145, 373 (1998), doi: 10.1016/S0168-583X(98)00417-0
  • [7] A.D. Pogrebnjak, A.D. Mikhaliov, A.D., N.A. Pogrebnjak, Phys. Let. 241, 357 (1998), doi: 10.1016/S0375-9601(98)00131-5
  • [8] V.N. Zhytomirsky, Surf. Coat. Technol. 201, 6122 (2007), doi: 10.1016/j.surfcoat.2006.08.125
  • [9] G.A. Fontalvo, V. Terziyska, C. Mitterer, Surf. Coat. Technol. 202, 1017 (2007), doi: 10.1016/j.surfcoat.2007.07.043
  • [10] N. Hayashi, I.H. Murzin, I. Sakamoto, M. Ohkubo Thin Solid Films 259, 146 (1995), doi: 10.1016/0040-6090(94)06436-9
  • [11] G. Cappuccio, U. Gambardella, A. Morone, S. Orlando, G.P. Patisi, Appl. Surf. Sci. 109, 399 (1997), doi: 10.1016/S0169-4332(96)00758-1
  • [12] J. Wang, Z. Song, K. Xu, Surf. Coat. Technol. 201, 4931 (2007), doi: 10.1016/j.surfcoat.2006.07.082
  • [13] J.J. Jeong, C.M. Lee, Appl. Surf. Sci. 214, 11 (2003), doi: 10.1016/S0169-4332(03)00351-9
  • [14] G. Beamson, D. Briggs, High Resolution XPS of Organic Polymers, The Scienta ESCA300 Database, Wiley Interscience 1992, doi: 10.1021/ed070pA25.5
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv128n536kz
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