PL EN


Preferences help
enabled [disable] Abstract
Number of results
2015 | 128 | 5 | 939-942
Article title

Tailoring the Internal Evaporator for Effective Ion Beam Production - Volatile vs. Non-Volatile Substances

Content
Title variants
Languages of publication
EN
Abstracts
EN
Two different designs of the internal evaporator in an arc discharge ion source are presented, suitable either for volatile, or high-melting point substances. A matter of the evaporator size and placement in order to obtain its appropriate temperature and, therefore, a stable and intense ion beam, is considered. Basic ion source characteristics, i.e. the dependences of ion current and discharge voltage on the discharge and filament currents as well as on the external magnetic field flux density are shown and discussed in order to find optimal working conditions. The results of measurements for both volatile (P, Zn, Se, S) and non-volatile (Pd) are presented, showing the applicability of the design for ion implantation purposes.
Keywords
EN
Year
Volume
128
Issue
5
Pages
939-942
Physical description
Dates
published
2015-11
References
  • [1] I.G. Brown, B. Feinberg, J.E. Galvin, J. Appl. Phys. 63, 4889 (1988), doi: 10.1063/1.340429
  • [2] A.I. Ryabchikov, S.V. Dektjarev, I.B. Stepanov, Rev. Sci. Instrum. 65, 3126 (1994), doi: 10.1063/1.1144766
  • [3] S.P. Bugaev, A.G. Nikolaev, E.M. Oks, P.M. Schanin, G.Yu. Yushkov, Rev. Sci. Instrum. 65, 3119 (1994), doi: 10.1063/1.1144765
  • [4] L. Penescu, R. Catherall, J. Lettry, T. Stora, Rev. Sci. Instrum. 81, 02A906 (2010), doi: 10.1063/1.3271245
  • [5] P.P. Deichuli, A.A. Ivanov, N.V. Stupishin, Rev. Sci. Instrum. 79, 02C106 (2008), doi: 10.1063/1.2821511
  • [6] I.G. Brown, The Physics and Technology of Ion Sources, Wiley, Weinheim 2004
  • [7] I.G. Brown, E. Oks, IEEE Trans. Plasma Sci. 33, 1931 (2005), doi: 10.1109/TPS.2005.860088
  • [8] M. Turek, S. Prucnal, A. Droździel, K. Pyszniak, Rev. Sci. Instrum. 80, 043304 (2009), doi: 10.1063/1.3117357
  • [9] M. Turek, A. Droździel, K. Pyszniak, S. Prucnal, J. Żuk, Przeglad Elektrotechniczny 86, 193 (2010)
  • [10] M. Turek, S. Prucnal, A. Droździel, K. Pyszniak, Nucl. Instrum. Methods Phys. Res. B 269, 700 (2011), doi: 10.1016/j.nimb.2011.01.133
  • [11] M. Turek, A. Droździel, K. Pyszniak, S. Prucnal, D. Mączka, Yu. Yushkevich, A. Vaganov, Instrum. Exp. Techn. 55, 469 (2012), doi: 10.1134/S0020441212030062
  • [12] S. Prucnal, M. Turek, A. Drozdziel, K. Pyszniak, S.Q. Zhou, A. Kanjilal, W. Skorupa, J. Zuk, Appl. Phys. B 101, 315 (2010), doi: 10.1007/s00340-010-4140-5
  • [13] S. Prucnal, M. Turek, A. Drozdziel, K. Pyszniak, A. Wojtowicz, S.Q. Zhou, A. Kanjilal, A. Shalimov, W. Skorupa, J. Zuk, Centr. Europ. J. Phys. 9, 338 (2011), doi: 10.2478/s11534-010-0107-8
  • [14] S. Prucnal, S.-Q. Zhou, X. Ou, H. Reuther, M.O. Liedke, A. Mücklich, M. Helm, J. Zuk, M. Turek, K. Pyszniak, W. Skorupa, Nanotechnology 23, 485204 (2012), doi: 10.1088/0957-4484/23/48/485204
  • [15] P. Węgierek, P. Billewicz, Acta Phys. Pol. A 123, 948 (2013), doi: 10.12693/APhysPolA.123.948
  • [16] T. Wilczyńska, R. Wiśniewski, P. Konarski, Przegląd Elektrotechniczny 88, 292 (2012) (in Polish)
  • [17] M. Turek, A. Droździel, K. Pyszniak, S. Prucnal, Nucl. Instrum. Methods Phys. Res. A 654, 57 (2011), doi: 10.1016/j.nima.2011.06.100
  • [18] J. O'Connell, Phys. Teach. 37, 551 (1999), doi: 10.1119/1.880403
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv128n533kz
Identifiers
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.