Thermal Desorption of Helium from Defected Silicon

• Authors: M. Turek , A. Droździel , K. Pyszniak , A. Wójtowicz , D. Mączka , Y. Yuschkevich , Y. Vaganov , J. Żuk
• Languages of publication: EN

Abstracts

EN

The thermal desorption spectroscopy measurements of He implanted silicon samples are reported. The He implantation energy was 90 keV (at 45° tilt) while the fluence was 10¹⁶ cm¯². Additionally, the influence of Si pre-implantation (fluences in the range 10¹⁴-10¹⁶ cm¯², E=260 keV) was under investigation. The He releases from both interstitials/vacancies (β peak) and cavities (α peak or rather band consisting probably of at least two peaks) were observed. The α peak disappears for the pre-implantation fluences larger than 10¹⁵ cm¯², while β peak becomes broader and shifts toward higher temperatures. The thermal desorption spectra were collected using heating ramp rates in the range 0.3-0.7 K/s. Desorption activation energy of the β peak for different pre-implantation fluences was found using the Redhead analysis of the β peak shift. It varies from 0.97 eV for the sample that was not pre-implanted up to 1.3 eV for the sample pre-implanted with the fluence 10¹⁶ cm¯².

Keywords

EN

68.43.Vx; 61.72.uf

Discipline

• 68.43.Vx: Thermal desorption
• 61.72.uf: Ge and Si

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2015
• Volume: 128
• Issue: 5
• Pages: 849-852

Dates

published

2015-11

Contributors

author

M. Turek

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

A. Droździel

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

K. Pyszniak

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

A. Wójtowicz

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

D. Mączka

• National Centre for Nuclear Research, A. Sołtana 7, 05-400 Otwock

author

Y. Yuschkevich

• Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow region, Russia

author

Y. Vaganov

• Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow region, Russia

author

J. Żuk

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

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Identifiers

DOI

10.12693/APhysPolA.128.849