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2015 | 128 | 5 | 849-852
Article title

Thermal Desorption of Helium from Defected Silicon

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EN
Abstracts
EN
The thermal desorption spectroscopy measurements of He implanted silicon samples are reported. The He implantation energy was 90 keV (at 45° tilt) while the fluence was 10¹⁶ cm¯². Additionally, the influence of Si pre-implantation (fluences in the range 10¹⁴-10¹⁶ cm¯², E=260 keV) was under investigation. The He releases from both interstitials/vacancies (β peak) and cavities (α peak or rather band consisting probably of at least two peaks) were observed. The α peak disappears for the pre-implantation fluences larger than 10¹⁵ cm¯², while β peak becomes broader and shifts toward higher temperatures. The thermal desorption spectra were collected using heating ramp rates in the range 0.3-0.7 K/s. Desorption activation energy of the β peak for different pre-implantation fluences was found using the Redhead analysis of the β peak shift. It varies from 0.97 eV for the sample that was not pre-implanted up to 1.3 eV for the sample pre-implanted with the fluence 10¹⁶ cm¯².
Keywords
EN
Publisher

Year
Volume
128
Issue
5
Pages
849-852
Physical description
Dates
published
2015-11
Contributors
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • National Centre for Nuclear Research, A. Sołtana 7, 05-400 Otwock
  • Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow region, Russia
author
  • Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow region, Russia
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv128n509kz
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