Study of Gas Permeation Through Thin ta-C:H Films

• Authors: J. Lackner , W. Waldhauser , M. Kahn
• Languages of publication: EN

Abstracts

EN

Protective ultra-thin barrier films gather increasing economic interest for controlling permeation and diffusion from the biological surrounding in implanted sensor and electronic devices in future medicine. Thus, the aim of this work was the investigation of the film thickness influence on the gas permeation barrier of ultra-thin, cytocompatible tetrahedral amorphous carbon (ta-C:H) films on polyimide (PI) foils. Plasma-activated chemical vapor deposition (direct deposition from an ion source) was applied to deposit these diamond-like carbon films. The results indicate high barrier to hydrogen gas permeation by all film thicknesses (<0.2% H₂ permeation compared to uncoated PI). While the thickness of the ta-C:H layers has minor influence, the number of layers, realized by one- or double-side deposition strongly impacts the barrier effect. Finally, tests under tensile stresses showed minor impact in the elasto-plastic deformation regime, but the expected strong increase of gas permeation after exceeding the tensile strength and film fracture.

Keywords

EN

73.50.-h

Discipline

• 73.50.-h: Electronic transport phenomena in thin films(for electronic transport in mesoscopic systems, see 73.23.-b; see also 73.40.-c Electronic transport in interface structures; for electronic transport in nanoscale materials and structures, see 73.63.-b)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2015
• Volume: 127
• Issue: 4
• Pages: 1236-1239

Dates

published

2015-04

Contributors

author

J. Lackner

• Joanneum Research Forschungsgesellschaft mbH, Institute for Surface Technologies and Photoniks, 8712 Niklasdorf, Austria

author

W. Waldhauser

• Joanneum Research Forschungsgesellschaft mbH, Institute for Surface Technologies and Photoniks, 8712 Niklasdorf, Austria

author

M. Kahn

• Infineon Technologies Austria AG, 9500 Villach, Austria

References

• [1] M. Mazzuferi, R. Bovolenta, M. Bocchi, T. Braun, J. Bauer, E. Jung, R. Gambari, Biomaterials 31, 1045 (2010), doi: 10.1016/j.biomaterials.2009.10.025
• [2] D. Feili, M. Schuettler, T. Doerge, S. Kammer, T. Stieglitz, Sensors Actuators A Phys. 120, 101 (2005), doi: 10.1016/j.sna.2004.11.021
• [3] H. Makamba, J.H. Kim, K. Lim, N. Park, J.H. Hahn, Electrophoresis 24, 3607 (2003), doi: 10.1002/elps.200305627
• [4] W.C. Sung, C.C. Chang, H. Makamba, S.H. Chen, Anal. Chem. 80, 1529 (2008), doi: 10.1021/ac7020618
• [5] M. Walther, M. Heming, M. Spallek, Surf. Coatings Technol. 80, 200 (1996), doi: 10.1016/0257-8972(95)02711-4
• [6] S.D. Senturia, Microsystem Design, Springer Science+Business Media, LLC: New York, NY, USA, 2005
• [7] C. Charton, N. Schiller, M. Fahland, A. Holländer, A. Wedel, K. Noller, Thin Solid Films 502, 99 (2006), doi: 10.1016/j.tsf.2005.07.253
• [8] A. Hogg, H. Keppner, T. Aellen, J. Burger, Ultra-Thin Multi-Layer Protection, US Patent 2011/0039050 A1, 2011
• [9] N.D. Hoivik, J.W. Elam, R.J. Linderman, V.M. Bright, S.M. George, Y.C. Lee, Sensors Actuators A Phys. 103, 100 (2003), doi: 10.1016/S0924-4247(02)00319-9
• [10] S. Linder, W. Pinkowski, M. Aepfelbacher, Biomaterials 23, 767 (2002), doi: 10.1016/S0142-9612(01)00182-X
• [11] Y. Letterier, Progr. Mater. Sci. 48, 1 (2003), doi: 10.1016/S0079-6425(02)00002-6
• [12] M. Kahn, M. Cekada, T. Schöberl, R. Berghauser, C. Mitterer, C. Bauer, W. Waldhauser, E. Brandstätter, Thin Solid Films 517, 6502 (2009), doi: 10.1016/j.tsf.2009.03.213
• [13] J.M. Lackner, C. Meindl, C. Wolf, A. Fian, C. Kittinger, M. Kot, L. Major, C. Czibula, C. Teichert, W. Waldhauser, A.-M. Weinberg, E. Fröhlich, Coatings 3, 268 (2013), doi: 10.3390/coatings3040268
• [14] J.M. Lackner, Habilitation Thesis, Polish Academy of Sciences, Institute of Metallurgy and Materials Science, Krakow (Poland), Orekop 2005
• [15] J.M. Lackner, W. Waldhauser, M. Schwarz, L. Mahoney, L. Major, B. Major, Vacuum 83, 302 (2008), doi: 10.1016/j.vacuum.2008.06.006
• [16] M. Kahn, M. Cekada, R. Berghauser, W. Waldhauser, C. Bauer, C. Mitterer, E. Brandstätter, Diam. Rel. Mater. 17, 1647 (2008), doi: 10.1016/j.diamond.2008.02.010
• [17] A. Konrad, B. Pannwitt, R. Hempelmann, F. Arena, W. Waldhauser, L. Strack, W. Oelerich, M. Block, Permeation and Leak Testing of Composites for Tank Systems under Tensile Stress, Presentation at Tank.Tech 2009 Meeting, 10./11.11.2009
• [18] B.M. Henry, A.P. Roberts, C.R.M. Grovenor, A.P. Sutton, G.A.D. Briggs, Y. Proc. 41st Society of Vacuum Coaters Annual Conference, Boston, April 18-23, SVC, 434 (1998)
• [19] D.R. Wheeler, H. Osaki, ACS Symposium Series 440, 500 (1990)
• [20] J.M. Lackner, W. Waldhauser, R. Major, L. Major, P. Hartmann, Surf. Coatings Technol. 215, 192 (2013), doi: 10.1016/j.surfcoat.2012.08.080

Identifiers

DOI

10.12693/APhysPolA.127.1236