Thermo-Optical Parameters of Amorphous a-C:N:H Layers

• Authors: E. Pieczyńska , J. Jaglarz , K. Marszalek , K. Tkacz-Śmiech
• Languages of publication: EN

Abstracts

EN

Thermo-optical properties of hydrogenated amorphous carbon nitride layers (a-C:N:H) deposited on crystalline silicon by plasma assisted chemical vapour deposition were studied. The layers were characterized by the Fourier transform infrared spectroscopy and their chemical composition, i.e. [N]/[C] ratio, was determined by energy dispersive X-ray technique. The optic measurements were made by spectroscopic ellipsometer Wollam M2000 equipped with a heated vacuum chamber. The measurements of ellipsometric angles were carried out during heating the sample from room temperature to 300°C. Refractive index, extinction coefficient and the layer thicknesses were calculated by fitting the model of the layer to the ellipsometric data. The results confirm that at about 23°C the layer properties are changed. The measured thermo-optical parameters, dn/dT and dk/dT, show abrupt change from negative to positive values which can be explained by structure graphitization. Simultaneously, the bandgap decreases from 2.5 to 0.7 eV and the layer thickness drops to about 50% of the initial value.

Keywords

EN

07.60.Fs; 78.20.-e; 78.20.Ci; 78.20.N-; 78.30.Ly; 81.05.U-; 81.15.Gh

Discipline

• 78.30.Ly: Disordered solids
• 81.05.U-: Carbon/carbon-based materials(for carbon-based superconductors, see 74.70.Wz)
• 78.20.Ci: Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
• 81.15.Gh: Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)(for chemistry of MOCVD, see 82.33.Ya in physical chemistry and chemical physics)
• 07.60.Fs: Polarimeters and ellipsometers
• 78.20.-e: Optical properties of bulk materials and thin films(for optical properties related to materials treatment, see 81.40.Tv; for optical materials, see 42.70-a; for optical properties of superconductors, see 74.25.Gz; for optical properties of rocks and minerals, see 91.60.Mk; for optical properties of specific thin films, see 78.66.-w)
• 78.20.N-: Thermo-optic effects

• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 126
• Issue: 6
• Pages: 1241-1245

Dates

published

2014-12

received

2014-04-03

Contributors

author

E. Pieczyńska

• AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Kraków, Poland

author

J. Jaglarz

• Cracow Technical University, Podchor k ażych 1, 30-084 Kraków, Poland

author

K. Marszalek

• AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Kraków, Poland

author

K. Tkacz-Śmiech

• AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Kraków, Poland

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Identifiers

DOI

10.12693/APhysPolA.126.1241