Thermal Desorption Studies of Ar^{+} Implanted Silicon

• Authors: A. Drozdziel , A. Wojtowicz , M. Turek , K. Pyszniak , D. Maczka , B. Slowinski , Y. Yushkevich , J. Zuk
• Languages of publication: EN

Abstracts

EN

Thermal desorption spectrometry measurements were performed for Ar implanted Si samples. Implantation energy E_{i} varied in the range 85-175 keV. The release of implanted Ar in two steps was observed in the temperature range 930-1300 K: the relatively narrow peak at lower temperature ( ≈ 930 K for implantation fluence 5 × 10^{16} cm^{-2}) is due to the release of Ar from the agglomerations (bubbles) while the broader peak observed for higher temperatures ( ≈ 950 K for implantation fluence 5 × 10^{16} cm^{-2}) comes from Ar atoms diffusing out of the sample. Inverse order of peaks is observed compared to the results for lower energy implantations (< 50 keV). Analyzing the thermal desorption spectra collected for different heating ramp rates enabled estimation of the desorption activation energy (2 eV for E_{i} = 85 keV and 1.7 eV for E_{i} = 115 keV).

Keywords

EN

68.43.Vx; 61.72.uf

Discipline

• 68.43.Vx: Thermal desorption
• 61.72.uf: Ge and Si

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 6
• Pages: 1400-1404

Dates

published

2014-06

Contributors

author

A. Drozdziel

• Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland

author

A. Wojtowicz

• Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland

author

M. Turek

• Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland

author

K. Pyszniak

• Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland

author

D. Maczka

• National Centre for Nuclear Studies, Świerk-Otwock, Poland

author

B. Slowinski

• National Centre for Nuclear Studies, Świerk-Otwock, Poland

author

Y. Yushkevich

• Laboratory of Nuclear Problems, JINR Dubna, Russia

author

J. Zuk

• Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland

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Identifiers

DOI

10.12693/APhysPolA.125.1400