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2014 | 125 | 6 | 1400-1404
Article title

Thermal Desorption Studies of Ar^{+} Implanted Silicon

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Abstracts
EN
Thermal desorption spectrometry measurements were performed for Ar implanted Si samples. Implantation energy E_{i} varied in the range 85-175 keV. The release of implanted Ar in two steps was observed in the temperature range 930-1300 K: the relatively narrow peak at lower temperature ( ≈ 930 K for implantation fluence 5 × 10^{16} cm^{-2}) is due to the release of Ar from the agglomerations (bubbles) while the broader peak observed for higher temperatures ( ≈ 950 K for implantation fluence 5 × 10^{16} cm^{-2}) comes from Ar atoms diffusing out of the sample. Inverse order of peaks is observed compared to the results for lower energy implantations (< 50 keV). Analyzing the thermal desorption spectra collected for different heating ramp rates enabled estimation of the desorption activation energy (2 eV for E_{i} = 85 keV and 1.7 eV for E_{i} = 115 keV).
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EN
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Year
Volume
125
Issue
6
Pages
1400-1404
Physical description
Dates
published
2014-06
Contributors
author
  • Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland
author
  • National Centre for Nuclear Studies, Świerk-Otwock, Poland
author
  • National Centre for Nuclear Studies, Świerk-Otwock, Poland
author
  • Laboratory of Nuclear Problems, JINR Dubna, Russia
author
  • Institute of Physics, Maria Curie-Skłodowska University, Lublin, Poland
References
  • [1] A.A. van Gorkum, E.V. Kornelsen, Vacuum 31, 89 (1981), doi: 10.1016/S0042-207X(81)80165-0
  • [2] G.F. Cerofolini, G. Calzolari, F. Corni, S. Frabboni, C. Nobili, G. Ottaviani, R. Tonini, Phys. Rev. B 61, 10183 (2000), doi: 10.1103/PhysRevB.61.10183
  • [3] E. Oliviero, M.F. Beaufort, J.F. Barbot, A. van Veen, A.V. Fedorov, J. Appl. Phys. 93, 231 (2003), doi: 10.1063/1.1527974
  • [4] D. Edwards, J. Appl. Phys. 46, 1444 (1975), doi: 10.1063/1.321792
  • [5] R. Hanada, S. Haito, CYRIC Reports 1994, 13 (1994)
  • [6] V.A. Belous, A.S. Kuprin, N.S. Lomino, V.D Ovcharenko, E.N. Reshetnyak, O.M. Morozov, V.I. Zhurba, G.N. Tolmachova, Proc. NAP 1, 04RES07 (2012)
  • [7] M.H.J. 't Hoen, B. Tyburska-Püschel, K. Ertl, M. Mayer, J. Rapp, A.W. Kleyn, P.A. Zeijlmans van Emmichoven, Nucl. Fusion 52, 023008 (2012), doi: 10.1088/0029-5515/52/2/023008
  • [8] V. Kh. Alimov, B. Tyburska-Püschel, S. Lindig, Y. Hatano, M. Balden, J. Roth, K. Isobe, M. Matsuyama, T. Yamanishi, J. Nucl. Mater. 420, 519 (2012), doi: 10.1016/j.jnucmat.2011.11.003
  • [9] R. Kurata, M. Kobayashi, S. Suzuki, W. Wang, N. Ashikawa, A. Sagara, N. Yoshida, Y. Oya, K. Okuno, J. Plasma Fusion Res. 9, 193 (2010)
  • [10] Y.M. Zakaria, Thermal Desorption Analysis of Helium Trapping in Ion-Implanted Beryllium, Open Access Dissertations and Theses, Paper 2371 (1996)
  • [11] W.M. Lau, I. Bello, L.J. Huang, X. Feng, M. Vos, I.V. Mitchell, J. Appl. Phys. 74, 7105 (1993), doi: 10.1063/1.355024
  • [12] A. Filius, A. van Veen, K.R. Bijkerk, J.H. Evans, Radiat. Eff. 108, 1 (1989), doi: 10.1080/10420158908217864
  • [13] R. Hanada, S. Saito, S. Nagata, S. Yamaguchi, T. Shinozuka, I. Fujioka, Mater. Sci. Forum 196-201, 1375 (1995), doi: 10.4028/www.scientific.net/MSF.196-201.1375
  • [14] H. Kimura, M. Sasaki, Y. Morimoto, T. Takeda, H. Kodama, A. Yoshikawa, M. Oyaidzu, K. Takahashi, K. Sakamoto, T. Imai, K. Okuno, J. Nucl. Mater. 337-339, 614 (2005), doi: 10.1016/j.jnucmat.2004.10.079
  • [15] M. Turek, S. Prucnal, A. Droździel, K. Pyszniak, Nucl. Instrum. Methods Phys. Res. B 269, 700 (2011), doi: 10.1016/j.nimb.2011.01.133
  • [16] M. Turek, A. Droździel, K. Pyszniak, S. Prucnal, D. Mączka, Yu. Yushkevich, Yu.A. Vaganov, Instrum. Exp. Tech. 55, 469 (2012), doi: 10.1134/S0020441212030062
  • [17] M. Turek, A. Droździel, K. Pyszniak, S. Prucnal, Nucl. Instrum. Methods Phys. Res. A 654, 57 (2011), doi: 10.1016/j.nima.2011.06.100
  • [18] M. Turek, S. Prucnal, A. Droździel, K. Pyszniak, Rev. Sci. Instrum. 80, 043304 (2009), doi: 10.1063/1.3117357
  • [19] M. Turek, A. Drozdziel, K. Pyszniak, S. Prucnal, J. Żuk, Przegląd Elektrotechniczny 7, 193 (2010) (in Polish) http://pe.org.pl/abstract_pl.php?nid=4005
  • [20] K. Wittmaack, P. Blank, W. Wach, Radiat. Effects 39, 81 (1978), doi: 10.1080/00337577808237907
  • [21] S.K. Erents, G.M. McCraken, Radiat. Effects 18, 191 (1973), doi: 10.1080/00337577308232121
  • [22] J.F. Ziegler, M.D. Ziegler, J.P. Biersack, Nucl. Instrum. Methods Phys. Res. B 268, 1818 (2010), doi: 10.1016/j.nimb.2010.02.091
  • [23] P.A. Redhead, Vacuum 12, 203 (1962), doi: 10.1016/0042-207X(62)90978-823
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv125n639kz
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