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Abstracts
The influence of injection-thermal and plasma treatments on the characteristics of the MOS-structure is studied. It is shown that the thermal stable part of the negative charge which accumulates in the phosphorus-silicate glass (PSG) film in the structures with the two-layer gate dielectric SiO_2-PSG under high-field Fowler-Nordheim electron injection can be used for the characteristics modification of MOS-structures with above described structure. The injection-thermal and plasma treatments of MOS-structures are offered to use for improving the reliability and finding the samples which have the charge defects. It is found that using the injection-thermal and plasma treatments allows to increase the injection and radiation stability of the dielectric films of MOS-structures due to structural changes in the SiO_2 film and Si-SiO_2 interface.
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Volume
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Pages
1371-1374
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Dates
published
2014-06
Contributors
author
- Bauman Moscow State Technical University, Kaluga Branch, 2, Bazhenov Str., Kaluga, 248600, Russia
author
- National Research University Higher School of Economics, 20, Myasnitskaya Ulitsa, Moscow 101000, Russia
author
- The State Unitary Enterprise of a City of Moscow Research-and-Production Centre "SPURT" Zelenograd, 4, West of the 1st proezd, 124460, Russia
author
- Bauman Moscow State Technical University, Kaluga Branch, 2, Bazhenov Str., Kaluga, 248600, Russia
References
- [1] S. Lombardo, J.H. Stathis, P. Linder, K.L. Pey, F. Palumbo, C.H. Tung, J. Appl. Phys. 98, 121301 (2005), doi: 10.1063/1.2147714
- [2] V.V. Afanas'ev, A. Stesmans, J. Appl. Phys. 102, 081301 (2007), doi: 10.1063/1.2799091
- [3] V.A. Gritsenko, Physics-Uspekhi 52, 869 (2009), doi: 10.3367/UFNe.0179.200909a.0921
- [4] V.V. Andreev, G.G. Bondarenko, V.M. Maslovsky, A.A. Stolyarov, IOP Conf. Series: Mater. Sci. Eng. 41, 012017 (2012), doi: 10.1088/1757-899X/41/1/012017
- [5] G.G. Bondarenko, V.V. Andreev, V.M. Maslovsky, A.A. Stolyarov, V.E. Drach, Thin Solid Films 427, 377 (2003), doi: 10.1016/S0040-6090(02)01146-X
- [6] G.G. Bondarenko, V.V. Andreev, V.E. Drach, S.A. Loskutov, M.A. Stolyarov, Thin Solid Films 515, 670 (2006), doi: 10.1016/j.tsf.2005.12.236
- [7] United States Military Standard MIL-STD-883H Method 1019.8 http://en.wikipedia.org/wiki/United_States_Military_Standard
Document Type
Publication order reference
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YADDA identifier
bwmeta1.element.bwnjournal-article-appv125n631kz