PL EN


Preferences help
enabled [disable] Abstract
Number of results
2014 | 125 | 6 | 1332-1334
Article title

Micro-Raman Investigation of Hydrogen Localized in Cone-Shaped Defects Formed on the Silicon Wafer Surface

Content
Title variants
Languages of publication
EN
Abstracts
EN
The goal of this work is the micro-Raman study of molecular hydrogen localized in cone-shaped defects, which are formed on the surface of previously helium implanted and annealed Czochralski Si wafers as a result of hydrogen plasma treatment. The line at ≈ 4158 cm^{-1} corresponding to molecular hydrogen is observed in the Raman spectra when the laser beam is focused both on cone-shaped defects or defect-free regions of the surface. The laser irradiation of cone-shaped defects during micro-Raman experiments leads to intensity increase of this line when the irradiation time is increasing, with subsequent appearance of lines at ≈ 3621 and ≈ 3698 cm^{-1} and simultaneous disappearance of 4158 cm^{-1} line. No such effect was observed when the laser beam was focused on defect-free regions. The experiments have shown that heat treatment of the samples studied causes the appearance in the Raman spectra of lines at ≈ 3468, ≈ 3621, and ≈ 3812 cm^{-1}, which can be associated with molecular hydrogen.
Keywords
EN
Year
Volume
125
Issue
6
Pages
1332-1334
Physical description
Dates
published
2014-06
References
  • [1] N.V. Frantskevich, A.V. Mazanik, A.V. Frantskevich, T. Kołtunowicz, P. Zukowski, Acta Phys. Pol. A 120, 105 (2011) http://przyrbwn.icm.edu.pl/APP/PDF/120/a120z1p26.pdf
  • [2] K. Murakami, N. Fukata, S. Sasaki, K. Ishioka, M. Kitajima, S. Fujimura, J. Kikuchi, H. Haneda, Phys. Rev. Lett. 77, 3161 (1996), doi: 10.1103/PhysRevLett.77.3161
  • [3] A.W.R. Leitch, J. Weber, V. Alex, Mater. Sci. Eng. B 58, 6 (1999), doi: 10.1016/S0921-5107(98)00265-7
  • [4] E.V. Lavrov, J. Weber, Phys. Rev. Lett. 89, 215501 (2002), doi: 10.1103/PhysRevLett.89.215501
  • [5] T. Mori, K. Otsuka, N. Umehara, K. Ishioka, M. Kitajima, S. Hishita, K. Murakami, Physica B 302-303, 239 (2001), doi: 10.1016/S0921-4526(01)00435-5
  • [6] O. Moutanabbir, B. Terreault, M. Chicoine, F. Schiettekatte, P.J. Simpson, Phys. Rev. B 75, 075201 (2007), doi: 10.1103/PhysRevB.75.075201
  • [7] S. Socher, E.V. Lavrov, J. Weber, Phys. Rev. B 86, 125205 (2012), doi: 10.1103/PhysRevB.86.125205
  • [8] Y.L. Huang, Y. Ma, R. Job, W.R. Fahrner, Appl. Phys. Lett. 86, 131911 (2005), doi: 10.1063/1.1953871
  • [9] M. Hiller, E.V. Lavrov, J. Weber, Phys. Rev. B 80, 045306 (2009), doi: 10.1103/PhysRevB.80.045306
  • [10] W. Düngen, R. Job, Y. Ma, Y.L. Huang, T. Mueller, W.R. Fahrner, L.O. Keller, J.T. Horstmann, H. Fiedler, J. Appl. Phys. 100, 034911 (2006), doi: 10.1063/1.3459884
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv125n622kz
Identifiers
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.