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Number of results
2014 | 125 | 6 | 1309-1312

Article title

Numerical Analysis of Metal-Cylinder-Based Microwave Plasma Module

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EN

Abstracts

EN
We present optimization of energy transfer in the waveguide-supplied metal-cylinder-based microwave plasma module with an inner cylindrical quartz tube. The construction of microwave plasma module is based on a WR 340 waveguide standard. Presented microwave plasma module operates at atmospheric pressure and frequency of 2.45 GHz. There is a reduced height section waveguide in microwave plasma module which provides local increase of the electric field in the plasma region. Microwave plasma module is terminated with a movable plunger which plays the role of the tuning element. Tuning characteristics of microwave plasma module are defined as the dependence of the P_{R}/P_{I} on the position l_{s} of the movable plunger, where P_{R} and P_{I} are the microwave power reflected and power incident, respectively. The powers P_{R} and P_{I} are measured in the input plane of microwave plasma module. The purpose of the presented optimization is to achieve P_{R} lower than 5% of P_{I} in widest range of position of movable plunger l_{s}. We used Comsol Multiphysics software to make numerical analysis which allows to optimize the parameters of microwave plasma module. Results of numerical analysis show that P_{R}/P_{I} is lower than 0.05 in a wide range of movable plunger position l_{s}.

Contributors

author
  • Centre for Plasma and Laser Engineering, The Szewalski Institute of Fluid-Flow Machinery Polish Academy of Sciences, J. Fiszera 14, 80-231 Gdańsk, Poland
author
  • Centre for Plasma and Laser Engineering, The Szewalski Institute of Fluid-Flow Machinery Polish Academy of Sciences, J. Fiszera 14, 80-231 Gdańsk, Poland
author
  • Centre for Plasma and Laser Engineering, The Szewalski Institute of Fluid-Flow Machinery Polish Academy of Sciences, J. Fiszera 14, 80-231 Gdańsk, Poland
  • Dept. of Marine Electronics, Gdynia Maritime University, Morska 81-87, 81-255 Gdynia, Poland

References

  • [1] M. Jasiński, M. Dors, J. Mizeraczyk, Plasma Chem. Plasma Proc. 29, 363 (2009), doi: 10.1007/s11090-009-9183-1
  • [2] M. Jasiński, J. Mizeraczyk, Z. Zakrzewski, J. High Temp. Mater. Proc. 6, 317 (2002)
  • [3] M. Dors, T. Izdebski, B. Hrycak, J. Mizeraczyk, M. Hołub, K. Bonisławski, Przegląd Elektrotechniczny 07a, 155 (2012) http://pe.org.pl/articles/2012/7a/35.pdf
  • [4] Z. Kolacinski, L. Szymanski, G. Raniszewski, S. Wiak, Przegląd Elektrotechniczny 10b, 149 (2012) http://pe.org.pl/articles/2012/10b/41.pdf
  • [5] M. Jasiński, M. Dors, H. Nowakowska, J. Mizeraczyk, Chemicke Listy 102, 1332 (2008)
  • [6] M. Jasiński, M. Dors, J. Mizeraczyk, Europ. Phys. J. D 54, 179 (2009), doi: 10.1140/epjd/e2008-00221-1
  • [7] J. Helszajn, Ridge Waveguides and Passive Microwave Components, Institution of Engineering and Technology, London U.K. 2000, doi: 10.1049/PBEW049E
  • [8] Z. Zakrzewski, D. Czylkowski, M. Jasiński, M. Moisan, D. Guerin, C. Larquet, J.C. Rostaing, Microwave Plasma Exciters, US Patent, US7799119 (2010)
  • [9] H. Nowakowska, M. Jasiński, J. Mizeraczyk, in: Proc. Comsol Conf., Hannover, Ed.: A. Jungr, Comsol AB, Hannover 2008 http://cds.comsol.com/Access/dl/papers/5334/Nowakowska.pdf
  • [10] M. Sobański, M. Jasiński, J. Mizeraczyk, Przegląd Elektrotechniczny 10b, 135 (2012) (in Polish) http://pe.org.pl/abstract_pl.php?nid=6614
  • [11] R.E. Collin, Field Theory of Guided Waves, McGraw-Hill, New York 1960
  • [12] H. Nowakowska, M. Jasiński, J. Mizeraczyk, Przegląd Elektrotechniczny 07, 84 (2010) (in Polish) http://pe.org.pl/abstract_pl.php?nid=3969

Document Type

Publication order reference

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bwmeta1.element.bwnjournal-article-appv125n615kz
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