Surface Properties of Me/Si Structures Prepared by Means of Self-Ion Assisted Deposition

• Authors: I. Tashlykov , P. Żukowski , O. Mikhalkovich , S. Baraishuk
• Languages of publication: EN

Abstracts

EN

In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modified by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed.

Keywords

EN

61.72.uf; 82.80.-d; 62.20.Qp

Discipline

• 62.20.Qp: Friction, tribology, and hardness(see also 46.55.+d Tribology and mechanical contacts in continuum mechanics of solids; for materials treatment effects on friction related properties, see 81.40.Pq)
• 82.80.-d: Chemical analysis and related physical methods of analysis(for related instrumentation, see section 07; for spectroscopic techniques in biological physics, see 87.64.-t)
• 61.72.uf: Ge and Si

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 6
• Pages: 1306-1309

Dates

published

2014-06

Contributors

author

I. Tashlykov

• Belarusian State Pedagogical University, 18, Sovetskaja Str., 220050 Minsk, Belarus

author

P. Żukowski

• Lublin University of Technology, Nadbystrzycka 38a, 20-618 Lublin, Poland

author

O. Mikhalkovich

• Belarusian State Pedagogical University, 18, Sovetskaja Str., 220050 Minsk, Belarus

author

S. Baraishuk

• Belarusian State Pedagogical University, 18, Sovetskaja Str., 220050 Minsk, Belarus

References

• [1] S.M. Baraishuk, V.F. Gremenok, V.V. Tuljev, I.S. Tashlykov, Phys. Chem. Treat. Mater. 1, 66 (2011)
• [2] I.S. Tashlykov, S.M. Baraishuk, O.M. Mikhalkovich, I. Antonovich, Przegląd Elektrotechniczny 84, 111 (2008) (in Polish) http://pe.org.pl/abstract_pl.php?nid=1444
• [3] N.A. Poklonski, N.I. Gorbachuk, Vo Quang Nha, S.V. Shpakovski, V.A. Filipenia, V.A. Skuratov, A. Wieck, Interact. Radiat. Solids 10, 146 (2013)
• [4] I.S. Tashlykov, O.M. Michalkovich, Phys. Chem. Treat. Mater. 5, 49 (2008)
• [5] I.S. Tashlykov, I.M. Belyi, O.G. Bobrovich, S. Kalbitzer, O. Meyer, G.K. Wolf, B. Enders, Nucl. Instrum. Methods Phys. Res. B 80-81, 98 (1993), doi: 10.1016/0168-583X(93)96084-P
• [6] L. Doolittle, Nucl. Instrum. Methods Phys. Res. B 15, 227 (1986), doi: 10.1016/0168-583X(86)90291-0
• [7] J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Vol. 1, Pergamon Press, Oxford 1985, p. 321
• [8] W.C. Oliver, G.M. Pharr, J. Mater. Res. 7, 1564 (1992), doi: 10.1557/JMR.1992.1564
• [9] E. Bögh, Canad. J. Phys. 46, 653 (1968), doi: 10.1139/p68-081

Identifiers

DOI

10.12693/APhysPolA.125.1306