Surface Properties of Me/Si Structures Prepared by Means of Self-Ion Assisted Deposition

• Authors: I. Tashlykov , P. Żukowski , O. Mikhalkovich , S. Baraishuk
• Languages of publication: EN

Abstracts

EN

In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modified by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed.

Keywords

EN

61.72.uf   82.80.-d   62.20.Qp  

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 6
• Pages: 1306-1309

Dates

published

2014-06

References

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Identifiers

DOI

10.12693/APhysPolA.125.1306