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2014 | 125 | 6 | 1306-1309
Article title

Surface Properties of Me/Si Structures Prepared by Means of Self-Ion Assisted Deposition

Content
Title variants
Languages of publication
EN
Abstracts
EN
In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modified by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed.
Keywords
EN
Year
Volume
125
Issue
6
Pages
1306-1309
Physical description
Dates
published
2014-06
References
  • [1] S.M. Baraishuk, V.F. Gremenok, V.V. Tuljev, I.S. Tashlykov, Phys. Chem. Treat. Mater. 1, 66 (2011)
  • [2] I.S. Tashlykov, S.M. Baraishuk, O.M. Mikhalkovich, I. Antonovich, Przegląd Elektrotechniczny 84, 111 (2008) (in Polish) http://pe.org.pl/abstract_pl.php?nid=1444
  • [3] N.A. Poklonski, N.I. Gorbachuk, Vo Quang Nha, S.V. Shpakovski, V.A. Filipenia, V.A. Skuratov, A. Wieck, Interact. Radiat. Solids 10, 146 (2013)
  • [4] I.S. Tashlykov, O.M. Michalkovich, Phys. Chem. Treat. Mater. 5, 49 (2008)
  • [5] I.S. Tashlykov, I.M. Belyi, O.G. Bobrovich, S. Kalbitzer, O. Meyer, G.K. Wolf, B. Enders, Nucl. Instrum. Methods Phys. Res. B 80-81, 98 (1993), doi: 10.1016/0168-583X(93)96084-P
  • [6] L. Doolittle, Nucl. Instrum. Methods Phys. Res. B 15, 227 (1986), doi: 10.1016/0168-583X(86)90291-0
  • [7] J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Vol. 1, Pergamon Press, Oxford 1985, p. 321
  • [8] W.C. Oliver, G.M. Pharr, J. Mater. Res. 7, 1564 (1992), doi: 10.1557/JMR.1992.1564
  • [9] E. Bögh, Canad. J. Phys. 46, 653 (1968), doi: 10.1139/p68-081
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv125n614kz
Identifiers
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