Photoluminescence Analysis of Oxygen Precipitation around Small-Angle Grain Boundaries in Multicrystalline Silicon Wafers

• Authors: G. Kato , M. Tajima , F. Okayama , S. Tokumaru , R. Sato , H. Toyota , A. Ogura
• Languages of publication: EN

Abstracts

EN

We have investigated the correlation between deep-level photoluminescence and the density of small-angle grain boundaries in multicrystalline Si. A deep-level photoluminescence component around 0.87 eV, which we previously ascribed to oxygen precipitates, became lower and higher in the region with high and low density of small-angle grain boundaries, respectively. This can be explained by the differences in the availability of oxygen atoms around respective small-angle grain boundaries. We performed focused ion beam time-of-flight secondary ion mass spectroscopy on special points emitting extremely strong 0.87 eV emission, and detected a clustered area of ^{16}O¯. This is strong evidence for the idea that the 0.87 eV band is due to oxygen precipitates.

Keywords

EN

78.55.Ap; 61.72.Qq; 82.80.Rt; 88.40.jj

Discipline

• 82.80.Rt: Time of flight mass spectrometry
• 61.72.Qq: Microscopic defects (voids, inclusions, etc.)
• 88.40.jj: Silicon solar cells
• 78.55.Ap: Elemental semiconductors

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 4
• Pages: 1010-1012

Dates

published

2014-04

Contributors

author

G. Kato

• Institute of Space and Astronautical Science/JAXA, Sagamihara 252-5210, Japan
• Meiji University, Kawasaki 214-8571, Japan

author

M. Tajima

• Institute of Space and Astronautical Science/JAXA, Sagamihara 252-5210, Japan
• Meiji University, Kawasaki 214-8571, Japan

author

F. Okayama

• Institute of Space and Astronautical Science/JAXA, Sagamihara 252-5210, Japan
• Meiji University, Kawasaki 214-8571, Japan

author

S. Tokumaru

• Nippon Steel & Sumitomo Metal Corporation, Futtsu 293-8511, Japan

author

R. Sato

• Nippon Steel & Sumikin Technology Co., Ltd, Futtsu 293-8511, Japan

author

H. Toyota

• Institute of Space and Astronautical Science/JAXA, Sagamihara 252-5210, Japan

author

A. Ogura

• Meiji University, Kawasaki 214-8571, Japan

References

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Identifiers

DOI

10.12693/APhysPolA.125.1010