Effects of RF Power on Electrical and Structural Properties of Sputtered SnO_2:Sb Thin Films

• Authors: O. Cevher , M. Guler , U. Tocoglu , T. Cetinkaya , H. Akbulut , S. Okumus
• Languages of publication: EN

Abstracts

EN

In this work, antimony doped tin oxide (SnO_2:Sb) thin films were fabricated using a radio frequency magnetron sputtering system on Si wafer and glass substrates. The base pressure in the sputtering chamber was 1.0 Pa. The SnO_2:Sb thin films were deposited for 1.0 h in a mixture of Ar and O_2 environment with O_2/Ar ratio of 10/90 at 75, 100, and 125 W RF sputtering powers. The microstructure of SnO_2:Sb thin films was assessed using a field emission scanning electron microscopy. The crystallographic structure of the sample was determined by X-ray diffraction. The average surface roughness (R_{a}) was measured with atomic force microscopy. The electrical resistivity of the deposited films was measured by the four-point-probe method. The thicknesses of the films were measured by surface profiler.

Keywords

EN

68.55.-a; 68.55.ag; 81.15.Cd

Discipline

• 68.55.ag: Semiconductors
• 81.15.Cd: Deposition by sputtering
• 68.55.-a: Thin film structure and morphology(for methods of thin film deposition, film growth and epitaxy, see 81.15.-z)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 2
• Pages: 293-295

Dates

published

2014-02

Contributors

author

O. Cevher

• Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey

author

M. Guler

• Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey

author

U. Tocoglu

• Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey

author

T. Cetinkaya

• Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey

author

H. Akbulut

• Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey

author

S. Okumus

• Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey

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Identifiers

DOI

10.12693/APhysPolA.125.293