PL EN


Preferences help
enabled [disable] Abstract
Number of results
2014 | 125 | 2 | 293-295
Article title

Effects of RF Power on Electrical and Structural Properties of Sputtered SnO_2:Sb Thin Films

Content
Title variants
Languages of publication
EN
Abstracts
EN
In this work, antimony doped tin oxide (SnO_2:Sb) thin films were fabricated using a radio frequency magnetron sputtering system on Si wafer and glass substrates. The base pressure in the sputtering chamber was 1.0 Pa. The SnO_2:Sb thin films were deposited for 1.0 h in a mixture of Ar and O_2 environment with O_2/Ar ratio of 10/90 at 75, 100, and 125 W RF sputtering powers. The microstructure of SnO_2:Sb thin films was assessed using a field emission scanning electron microscopy. The crystallographic structure of the sample was determined by X-ray diffraction. The average surface roughness (R_{a}) was measured with atomic force microscopy. The electrical resistivity of the deposited films was measured by the four-point-probe method. The thicknesses of the films were measured by surface profiler.
Keywords
EN
Contributors
author
  • Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey
author
  • Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey
author
  • Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey
author
  • Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey
author
  • Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey
author
  • Sakarya University, Engineering Faculty, Department of Metallurgical and Material Engineering, Esentepe Campus, Sakarya, Turkey
References
  • 1. F.J. Arlinghaus, doi: 10.1016/S0022-3697(74)80102-2, J. Phys. Chem. Solids 35, 931 (1974)
  • 2. K.Y. Rajpure, M.N. Kusumade, M.N. Neumann-Spallart, C.H. Bhosale, doi: 10.1016/S0254-0584(99)00256-4, Mater. Chem. Phys. 64, 184 (2000)
  • 3. T. Kawabe, S. Shimomura, T. Karasuda, K. Tabata, E. Suzuki, Y. Yamaguchi, doi: 10.1016/S0039-6028(99)00997-8, Surf. Sci. 448, 101 (2000)
  • 4. K.L. Chopra, S. Major, D.K. Pandya, doi: 10.1016/0040-6090(83)90256-0, Thin Solid Films 102, 1 (1983)
  • 5. D. Haridas, K. Sreenivas, V. Gupta, doi: 10.1016/j.snb.2008.02.030, Sensors Actuat. B 133, 270 (2008)
  • 6. J.A. Ayllon, M. Lira-Cantu, doi: 10.1007/s00339-008-5023-z, Appl. Phys. A 95, 249 (2009)
  • 7. R.E. Presley, C.L. Munsee, C.H. Park, D. Hong, J.F. Wager, D.A. Keszler, doi: 10.1088/0022-3727/37/20/006, J. Phys. D, Appl. Phys. 37, 2810 (2004)
  • 8. M.R. Cássia-Santos, V.C. Sousa, M.M. Oliveira, F.R. Sensato, W.K. Bacelar, J.W. Gomes, E. Longo, E.R. Leite, J.A. Varela, doi: 10.1016/j.matchemphys.2003.12.014, Mater. Chem. Phys. 90, 1 (2005)
  • 9. G. Frank, E. Kaur, H. Kostlin, doi: 10.1016/0165-1633(83)90004-7, Sol. Energy Mater. 8, 387 (1983)
  • 10. L.P. Peng, L. Fang, X.F. Yang, H.B. Ruan, Y.J. Li, Q.L. Huang, C.Y. Kong, doi: 10.1016/j.physe.2009.07.006, Physica E 41, 1819 (2009)
  • 11. J. Kane, H.P. Schweizer, W. Kern, J. Electrochem. Soc. 123, 270 (1976)
  • 12. A.R. Babar, S.S. Shinde, A.V. Moholkar, C.H. Bhosale, J.H. Kim, K.Y. Rajpure, doi: 10.1088/1674-4926/32/5/053001, J. Semicond. 32, 053001 (2011)
  • 13. H.L. Ma, X.T. Hao, J. Ma, Y.G. Yang, J. Huang, D.H. Zhang, X.G. Xu, doi: 10.1016/S0169-4332(02)00253-2, Appl. Surf. Sci. 191, 313 (2002)
  • 14. S.U. Lee, J.H. Boo, B. Hong, doi: 10.1143/JJAP.50.01AB10, Jpn. J. Appl. Phys. 50, 01AB10 (2011)
  • 15. H. Kim, A. Pique, doi: 10.1063/1.1639515, Appl. Phys. Lett. 84, 218 (2004)
  • 16. T.M. Hammad, N.K. Hejazy, doi: 10.1186/2228-5326-2-7, Int. Nano Lett. 2, 7 (2012)
  • 17. B.D. Cullity, Elements of X-ray Diffraction, Addison-Wesley, Massachusetts 1956
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv125n2040kz
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.