Cross-Sections and Transport Properties of F^{-} Ions in F_2

• Authors: V. Stojanović , Ž. Nikitović , J. Jovanović , Z. Raspopović
• Languages of publication: EN

Abstracts

EN

We present the new results for the simple scattering cross-section set and proposed transport coefficients for F^{-} ions in F_2 that can be used in such models. Nanbu's theory based on thermodynamic threshold energies and separating elastic and reactive collisions is used to calculate cross-sections for binary collisions of ions with atoms and molecules. Direct MC method is applied to obtain swarm parameters at temperature of T = 300 K.

Keywords

EN

51.10.+y; 52.20.Hv; 52.65.Pp; 52.77.-j

Discipline

• 52.77.-j: Plasma applications
• 52.65.Pp: Monte Carlo methods
• 51.10.+y: Kinetic and transport theory of gases(see also 05.20.Dd Kinetic theory in classical statistical mechanics; see also 47.70.Mc Radiation gas dynamics)
• 52.20.Hv: Atomic, molecular, ion, and heavy-particle collisions

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2014
• Volume: 125
• Issue: 1
• Pages: 46-48

Dates

published

2014-01

received

2013-05-24

(unknown)

2013-11-01

Contributors

author

V. Stojanović

• Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia

author

Ž. Nikitović

• Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia

author

J. Jovanović

• Faculty of Mechanical Engineering, University of Belgrade, Kraljice Marije 16, 11000 Belgrade, Serbia

author

Z. Raspopović

• Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia

References

• [1] M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharge and Materials Processing, Wiley, Hoboken 2005
• [2] C. Lee, M.A. Lieberman, doi: 10.1116/1.588371, J. Vac. Sci. Technol. A 13, 308 (1995)
• [3] J.T. Gudmundsson, M.A. Lieberman, doi: 10.1088/0963-0252/7/1/002, Plasma Sources Sci. Technol. 7, 1 (1998)
• [4] M. Takahashi, K. Maeda, T. Kitamura, M. Takasaki, S. Horiguchi, doi: 10.1016/0030-4018(94)00688-Q, Opt. Commun. 116, 269 (1995)
• [5] P.X. Hien, B.-H. Jeon, Do A. Tuan, doi: 10.7566/JPSJ.82.034301, J. Phys. Soc. Jpn. 82, 034301 (2013)
• [6] J. Matsui, N. Nakano, Z.Lj. Petrović, T. Makabe, doi: 10.1063/1.1347021, Appl. Phys. Lett. 78, 883 (2001)
• [7] H. Yamamoto, S. Matsumoto, K. Okada, J. Yu, K. Hirakuri, doi: 10.1016/j.diamond.2005.10.007, Diamond Relat. Mater. 15, 1357 (2006)
• [8] S. Radovanov, L. Godet, R. Dorai, Z. Fang, B.W. Koo, C. Carinaud, G. Cartry, D. Lenoble, A. Groullet, doi: 10.1063/1.2136211, J. Appl. Phys. 98, 113307 (2005)
• [9] K. Denpoh, K. Nanbu, doi: 10.1116/1.581259, J. Vac. Sci. Technol. A 16, 1201 (1998)
• [10] Z.Lj. Petrović, Z.M. Raspopović, V.D. Stojanović, J.V. Jovanović, G. Malović, T. Makabe, J. De Urquijo, doi: 10.1016/j.apsusc.2007.02.005, Appl. Surf. Sci. 253, 6619 (2007)
• [11] D. Spelsberg, W. Meyer, doi: 10.1063/1.467820, J. Chem. Phys. 101, 1282 (1994)
• [12] E.W. Mc Daniel, Atomic Collisions-Electron and Photon Projectiles, Wiley, New York 1989
• [13] J.A. Stockdale, D.R. Nelson, F.J. Davis, R.N. Compton, doi: 10.1063/1.467820, J. Chem. Phys. 56, 3336 (1972)
• [14] T. Simko, V. Martisovits, J. Bretagne, G. Gousset, doi: 10.1103/PhysRevE.56.5908, Phys. Rev. E 56, 5908 (1997)
• [14a] S. Longo, P. Diomede, doi: 10.1051/epjap:2004030, Europ. Phys. J. Appl. Phys. 26, 177 (2004)
• [15] Z.Lj. Petrović, J.V. Jovanović, V. Stojanović, Z.M. Raspopović, Z. Ristivojević, doi: 10.1140/epjd/e2008-00070-x 6, Eur. Phys. J. D 48, 87 (2008)
• [16] R.E. Robson, R.D. White, Z.Lj. Petrović, doi: 10.1103/RevModPhys.77.1303, Rev. Mod. Phys. 77, 1303 (2005)
• [17] Z.Lj. Petrović, V.D. Stojanović, doi: 10.1116/1.580991, J. Vac. Sci. Technol. A 16, 329 (1998)
• [18] Z. Raspopović, S. Sakadžić, Z.Lj. Petrović, T. Makabe, doi: 10.1088/0022-3727/33/11/308, J. Phys. D 33, 1298 (2000)
• [19] W.A. Chupka, J. Berkowitz, D. Gutman, doi: 10.1063/1.1676487, J. Chem. Phys. 55, 2724 (1971)
• [20] R.E. Robson, doi: 10.1071/PH910685, Aust. J. Phys. 44, 685 (1991)
• [21] Z.Lj. Petrović, S. Dujko, D. Marić, G. Malović, Ž. Nikitović, O. Šašić, J. Jovanović, V. Stojanović, M. Radmilović-Rađenović, doi: 10.1088/0022-3727/42/19/194002, J. Phys. D, Appl. Phys. 42, 194002 (2009)
• [22] V. Stojanović, Z. Raspopović, J. Jovanović, S. Radovanov, Ž. Nikitović, Z. Petrović, doi: 10.1016/j.nimb.2011.10.053 , Nucl. Instrum. Methods Phys. Res. B 279, 151 (2012)

Identifiers

DOI

10.12693/APhysPolA.125.46