X-Ray Photoelectron Spectroscopy Study of Nitrogen and Aluminum-Nitrogen Doped ZnO Films

• Authors: A. Ievtushenko , O. Khyzhun , I. Shtepliuk , V. Tkach , V. Lazorenko , G. Lashkarev
• Languages of publication: EN

Abstracts

EN

Undoped, nitrogen-doped and aluminum-nitrogen co-doped ZnO films were deposited on Si substrates by magnetron sputtering using layer-by-layer method of growth. X-ray photoelectron spectroscopy was employed to characterize electronic properties of undoped and nitrogen doped ZnO films. The effects of N and N-Al incorporation into the ZnO matrix on the X-ray photoelectron spectroscopy core-level and valence-band spectra of the films were studied and discussed.

Keywords

EN

79.60.-i; 77.55.hf; 68.55.Ln

Discipline

• 79.60.-i: Photoemission and photoelectron spectra(for photoelectron spectroscopy, see 87.64.ks in biological physics; 82.80.Pv in chemical analysis)
• 68.55.Ln: Defects and impurities: doping, implantation, distribution, concentration, etc.(for diffusion of impurities, see 66.30.J-)
• 77.55.hf: ZnO

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 124
• Issue: 5
• Pages: 858-861

Dates

published

2013-11

Contributors

author

A. Ievtushenko

• I. Frantsevich Institute for Problems of Material Science, National Academy of Science of Ukraine, Kyiv, Ukraine

author

O. Khyzhun

• I. Frantsevich Institute for Problems of Material Science, National Academy of Science of Ukraine, Kyiv, Ukraine

author

I. Shtepliuk

• I. Frantsevich Institute for Problems of Material Science, National Academy of Science of Ukraine, Kyiv, Ukraine

author

V. Tkach

• V. Bakul Institute for Superhard Materials, National Academy of Science of Ukraine, Kyiv, Ukraine

author

V. Lazorenko

• I. Frantsevich Institute for Problems of Material Science, National Academy of Science of Ukraine, Kyiv, Ukraine

author

G. Lashkarev

• I. Frantsevich Institute for Problems of Material Science, National Academy of Science of Ukraine, Kyiv, Ukraine

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Identifiers

DOI

10.12693/APhysPolA.124.858