Chemical Composition of Native Oxide Layers on In^{+} Implanted and Thermally Annealed GaAs

• Authors: M. Kulik , D. Kołodyńska , J. Żuk , F. Komarov , J. Filiks
• Languages of publication: EN

Abstracts

EN

Semi-insulating GaAs wafers have been implanted with 250 keV In^{+} ions at a fluence of 3 × 10^{16} cm^{-2}. The samples prepared in this way were subsequently annealed at a temperature of 600°C or 800°C for 2 h. Thicknesses of the native oxide layers on implanted GaAs after samples storage in air were evaluated using the Rutherford backscattering spectrometry with the nuclear reaction O^{16}(α,α)O^{16} method. The chemical composition of native oxide layers on In^{+} implanted and annealed GaAs has been studied using X-ray photoelectron spectroscopy. As_{2}O_{3}, As_{2}O_{5}, Ga_{2}O_{3}, GaAs, InAs and InAsO_4 compounds were detected in these layers.

Keywords

EN

61.72.uj; 79.60.-i; 82.80.Yc

Discipline

• 61.72.uj: III-V and II-VI semiconductors
• 79.60.-i: Photoemission and photoelectron spectra(for photoelectron spectroscopy, see 87.64.ks in biological physics; 82.80.Pv in chemical analysis)
• 82.80.Yc: Rutherford backscattering (RBS), and other methods of chemical analysis

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 5
• Pages: 943-947

Dates

published

2013-05

Contributors

author

M. Kulik

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

D. Kołodyńska

• Department of Inorganic Chemistry, Faculty of Chemistry, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 2, 20-031 Lublin, Poland

author

J. Żuk

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

F. Komarov

• Institute of Applied Physics Problems, Belarussian State University, Minsk, Belarus

author

J. Filiks

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

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Identifiers

DOI

10.12693/APhysPolA.123.943