Throttling Aperture as the Gaseous Secondary Electron Detector in the Variable Pressure/Environmental SEM

• Authors: M. Krysztof , W. Słówko
• Languages of publication: EN

Abstracts

EN

The authors analysed the conditions of the secondary electron detection with the use of the lower throttling aperture as the electron collector positioned close to the sample, at the distance less, or comparable to the aperture opening. For computer simulations of electron flow under various gas conditions, the software combining the commercial programme SIMION 3D v. 7.0, enabling computations of charged particles trajectories in the electric and magnetic fields, combined with the Monte Carlo one written by the authors was used. The results of the simulations show that the gas amplification of the electron signal and the noise to signal ratio are suitable for imaging at working gas pressures exceeding 1 hPa (100 Pa). The upper limit of the pressure defined by the electron beam scattering by far exceeds 10 hPa and is a question of the accelerating voltage and vacuum units design. The detector unit combined also with the differential pumping system has been designed in the form of an attachment to the classic scanning electron microscopy and applied in the JSM840 (JEOL) microscope. The simulation results have been proved experimentally.

Keywords

EN

41.85.-p; 52.80.Dy

Discipline

• 52.80.Dy: Low-field and Townsend discharges
• 41.85.-p: Beam optics(see also 07.77.Ka Charged-particle beam sources and detectors in instruments; 29.27.-a Beams in particle accelerators)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 5
• Pages: 880-883

Dates

published

2013-05

Contributors

author

M. Krysztof

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland

author

W. Słówko

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland

References

• 1. G.D. Danilatos, Adv. Electron. Electron Phys. 71, 109 (1988)
• 2. G.D. Danilatos, Adv. Electron. Electron Phys. 78, 1 (1990)
• 3. D.J. Stokes, Principles and Practice of Variable Pressure/Environmental Scanning Electron Microscopy (VP-ESEM), Wiley, Chichester 2008
• 4. W. Slówko, M. Krysztof, J. Microsc. 237, 292 (2010)
• 5. M. Krysztof, W. Slówko, Acta Phys. Pol. A 120, 19 (2011)

Identifiers

DOI

10.12693/APhysPolA.123.880