PL EN


Preferences help
enabled [disable] Abstract
Number of results
2013 | 123 | 5 | 877-879
Article title

Detector System for Three-Dimensional Imaging in the Variable Pressure/Environmental SEM

Content
Title variants
Languages of publication
EN
Abstracts
EN
The authors developed a method of three-dimensional surface reconstruction, which takes advantage of the angular distribution of backscattered electron emission to obtain a digital map of surface elevations. Such quantitative information about the surface topography is obtained by digital processing of four input images acquired from four electron detectors. The method was adapted to environmental conditions by means of the vacuum-detector equipment applicable for a standard scanning electron microscopy. The main part of the equipment is the vacuum-detector head containing the intermediate vacuum chamber with a semiconductor backscattered electron detector inside. The detector captures a zenith backscattered electron fraction passing through the throttling aperture placed closely to the sample at the distance comparable to the aperture diameter (0.6 mm). The system was dedicated to the investigations of solid nonconductive samples at pressures < 10 hPa but it has already been supplemented with a gaseous directional backscattered electron detector which can work at a distance of a few mm to be safe for biological samples.
Keywords
EN
Contributors
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland
References
  • 1. L. Reimer, R. Bongeler, V. Desai, Scan. Microsc. 1, 963 (1987)
  • 2. J. Paluszyński, W. Słówko, Vacuum 78, 533 (2005)
  • 3. J. Paluszyński, W. Słówko, J. Microsc. 233, 10 (2009)
  • 4. G.D. Danilatos, Adv. Electron. Electron Phys. 78, 1 (1990)
  • 5. D.J. Stokes, Principles and Practice of Variable Pressure/Environmental Scanning Electron Microscopy (VP-ESEM), Wiley, Chichester 2008
  • 6. W. Słówko, Patent application PL396065, 2011
  • 7. W. Słówko, Patent application PL399438, 2012
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv123n524kz
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.