Detector System for Three-Dimensional Imaging in the Variable Pressure/Environmental SEM

• Authors: W. Słówko , M. Krysztof
• Languages of publication: EN

Abstracts

EN

The authors developed a method of three-dimensional surface reconstruction, which takes advantage of the angular distribution of backscattered electron emission to obtain a digital map of surface elevations. Such quantitative information about the surface topography is obtained by digital processing of four input images acquired from four electron detectors. The method was adapted to environmental conditions by means of the vacuum-detector equipment applicable for a standard scanning electron microscopy. The main part of the equipment is the vacuum-detector head containing the intermediate vacuum chamber with a semiconductor backscattered electron detector inside. The detector captures a zenith backscattered electron fraction passing through the throttling aperture placed closely to the sample at the distance comparable to the aperture diameter (0.6 mm). The system was dedicated to the investigations of solid nonconductive samples at pressures < 10 hPa but it has already been supplemented with a gaseous directional backscattered electron detector which can work at a distance of a few mm to be safe for biological samples.

Keywords

EN

41.85.-p; 52.80.Dy

Discipline

• 52.80.Dy: Low-field and Townsend discharges
• 41.85.-p: Beam optics(see also 07.77.Ka Charged-particle beam sources and detectors in instruments; 29.27.-a Beams in particle accelerators)

• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 5
• Pages: 877-879

Dates

published

2013-05

Contributors

author

W. Słówko

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland

author

M. Krysztof

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland

References

• 1. L. Reimer, R. Bongeler, V. Desai, Scan. Microsc. 1, 963 (1987)
• 2. J. Paluszyński, W. Słówko, Vacuum 78, 533 (2005)
• 3. J. Paluszyński, W. Słówko, J. Microsc. 233, 10 (2009)
• 4. G.D. Danilatos, Adv. Electron. Electron Phys. 78, 1 (1990)
• 5. D.J. Stokes, Principles and Practice of Variable Pressure/Environmental Scanning Electron Microscopy (VP-ESEM), Wiley, Chichester 2008
• 6. W. Słówko, Patent application PL396065, 2011
• 7. W. Słówko, Patent application PL399438, 2012

Identifiers

DOI

10.12693/APhysPolA.123.877