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2013 | 123 | 5 | 874-876
Article title

Changes in Amorphous Hydrogenated Carbon Films by Ultraviolet and Infrared Laser Irradiation

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Abstracts
EN
Amorphous hydrogenated carbon films were formed on the Si (100) wafers by a direct-ion beam deposition method from pure acetylene and acetylene-hydrogen gas mixtures. The films were irradiated with a nanosecond Nd:YAG laser working at the first harmonics (λ_1=1064 nm), the fourth harmonics (λ_4=266 nm) or with a Nd:YVO_4 laser working at the third harmonic (λ_3=355 nm). The films were studied by the Raman scattering, micro-Fourier transform infrared and Fourier transform infrared spectroscopies, null-ellipsometry, optical and scanning electron microscope, and Vickers hardness method. Irradiation by the wavelength λ_1=1064 nm leads to graphitization and formation of the silicon carbide, because of the silicon substrate decomposition. The samples were strongly modified after the irradiation by λ_3=355 nm - the thickness of the films decreased, and silicon carbide was formed. It was observed that nano-structured materials (e.g. carbon nano-onions, nc-diamond) were formed after the irradiation by λ_4=266 nm.
Keywords
Contributors
  • Kaunas University of Technology, Studentų St. 50, LT-51368 Kaunas, Lithuania
author
  • Kaunas University of Technology, Studentų St. 50, LT-51368 Kaunas, Lithuania
author
  • Riga Technical University, 14 Azenes Str., LV-1068 Riga, Latvia
author
  • Institute of Solid State Physics, University of Latvia, 8 Kengaraga St., LV-1063 Riga, Latvia
References
  • 1. A. Grigonis, Z. Rutkuniene, A. Medvids, Vacuum 82, 1212 (2008)
  • 2. Q. Wei, J. Narayan, J. Int. Mater. Rev. 45, 133 (2000)
  • 3. N.B. Dahotre, Lasers in Surface Engineering, ASM Internat., Scarborought 1998
  • 4. D. Roy, Manish Chhowalla, H Wang, N. Sano, I. Alexandrou, T.W. Clyne, G.A.J. Amaratunga, J. Chem. Phys. Lett. 373, 52 (2003)
  • 5. L.G. Cançado, K. Takai, T. Enoki, M. Endo, Y.A. Kim, H. Mizusaki, A. Jorio, L.N. Coelho, R. Magalhães-Paniago, M.A. Pimenta, J. Appl. Phys. Lett. 88, 163106 (2006)
  • 6. M. Silinskas, A. Grigonis, J. Diam. Rel. Mat. 11, 1026 (2002)
  • 7. A. Grigonis, Z. Rutkuniene, V. Vinciunaite, Acta Phys. Pol. A 120, 26 (2011)
  • 8. F.-K. Tung, E. Perevedentseva, P.-W. Chou, C.-L. Cheng, J. Appl. Surf. Sci. 252, 1167 (2005)
  • 9. J.R. Shi, X. Shi, Z. Sun, E. Liu, H.S. Yang, L.K. Cheah, X.Z. Jin, J. Phys., Condens. Matter 11, 5111 (1999)
  • 10. L.V. Saraf, K.J. Bunch, M.H. Engelhard, P.L. Gassman, in: NANO`08, Ed. N.J. Piscataway, IEEE, New York 2008, p. 813
  • 11. G. Davidson, Spectroscopic Properties of Inorganic and Organometallic Compounds, Vol. 37, Royal Soc. Chem., London 2005
  • 12. M. Rybachuk, A. Hertwig, M. Weise, M. Sahre, M. Männ, U. Beck, J.M. Bell, Appl. Phys. Lett. 96, 211909 (2010)
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bwmeta1.element.bwnjournal-article-appv123n523kz
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