The Pressure Influence on the Properties of S-Phase Coatings Deposited by Reactive Magnetron Sputtering

• Authors: S. Fryska , J. Baranowska
• Languages of publication: EN

Abstracts

EN

Reactive magnetron sputtering of austenitic stainless steel in nitrogen containing atmosphere was used to deposit coatings composed of S-phase. The process was conducted at constant temperature (200°C). The influence of total and partial nitrogen pressure on coating characteristics was investigated. It was observed that both total and nitrogen partial pressures have influence on coating composition and microstructure. Increasing nitrogen content in the S-phase coating can have a beneficial effect on its corrosion characteristics. It was also found that coatings deposited in the ambient of high nitrogen contents are composed of S-phase and the additional high-nitrogen phase, which is of crucial influence on mechanical properties of the coatings. It was also found that partial argon pressure can contribute to the changes in mechanical properties of the coatings.

Keywords

EN

81.15.-z; 68.60.-p; 68.60.Bs; 68.55.J-

Discipline

• 68.60.Bs: Mechanical and acoustical properties
• 68.60.-p: Physical properties of thin films, nonelectronic
• 68.55.J-: Morphology of films
• 81.15.-z: Methods of deposition of films and coatings; film growth and epitaxy(for structure of thin films, see 68.55.-a; see also 85.40.Sz Deposition technology in microelectronics; for epitaxial dielectric films, see 77.55.Px)

• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 5
• Pages: 854-857

Dates

published

2013-05

Contributors

author

S. Fryska

• West Pomeranian University of Technology, Szczecin, Poland

author

J. Baranowska

• West Pomeranian University of Technology, Szczecin, Poland

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Identifiers

DOI

10.12693/APhysPolA.123.854