Production of Doubly Charged Ions Using a Hollow Cathode Ion Source with an Evaporator

• Authors: M. Turek , A. Droździel , K. Pyszniak , D. Mączka , B. Słowiński
• Languages of publication: EN

Abstracts

EN

The paper describes the production of doubly charged ions from solids and gases using a hollow cathode ion source with an internal evaporator heated by a spiral cathode filament and arc discharge. The obtained currents were 15 μA for Bi^{2+}, 10 μA for As^{2+} and Al^{2+}, 8 μA for Kr^{2+} and Xe^{2+}, 5 μA for In^{2+} and Ge^{2+}, enabling moderate dose implantations ( ≈ 10^{15} cm^{-3}) with doubly charged ions. Characteristics of the ion source are presented and discussed in order to choose the optimal working parameters. A brief presentation of numerical model of doubly and singly charged ions in the ion source is given. The calculated results (dependences of ion current on the anode voltage) are in good agreement with the experimental data.

Keywords

EN

07.77.Ka; 34.80.Dp; 61.72.uj

Discipline

• 61.72.uj: III-V and II-VI semiconductors
• 34.80.Dp: Atomic excitation and ionization
• 07.77.Ka: Charged-particle beam sources and detectors(see also 29.40.-n Radiation detectors in nuclear physics)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 5
• Pages: 843-846

Dates

published

2013-05

Contributors

author

M. Turek

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

A. Droździel

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

K. Pyszniak

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

D. Mączka

• National Centre for Nuclear Studies, Otwock-Świerk, Poland

author

B. Słowiński

• National Centre for Nuclear Studies, Otwock-Świerk, Poland

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Identifiers

DOI

10.12693/APhysPolA.123.843