Formation of Multilayered Ti-Hf-Si-N/NbN/Al_2O_3 Coatings with High Physical and Mechanical Properties

• Authors: A. Pogrebnjak , M. Prozorova , M. Kovalyova , O. Kolisnichenko , V. Beresnev , K. Oyoshi , Y. Takeda , A. Kaverina , A. Shypylenko , J. Partyka
• Languages of publication: EN

Abstracts

EN

This work presents the first results on forming of multi-layered superhard coatings Ti-Hf-Si-N/NbN/Al_2O_3 and their properties as well as structure. Microstructure, elemental and phase compositions of multi-layered coatings obtained by different methods were investigated. There were used such methods as: scanning electron microscopy EDS JEM-7000F microscope (with microanalysis) for research of cross-section of coatings, with subsequent Auger-electron spectroscopy, X-ray diffraction analysis, optical inverted microscope Olympus GX51, electron-ion microscopes Quanta 200 3D and Quanta 600 (scanning electron microscopy), equipped by the detector of X-ray radiation of the system PEGASUS 2000. It was stated that hardness of coatings has reached 56 GPa, and at the same time the factor of wearing during friction was the smallest - 2.571×10^{-5}. It was also noted that nitrogen pressure in the chamber at the deposition of the top layer significantly influences on the properties of samples. For example, the coefficient of friction at P=0.3 Pa from 0.2 at the beginning of track to 0.001 (during the tests), and at the pressure of nitrogen P=0.8 Pa, the coefficient of friction was equal to 0.314 at the beginning of track and 0.384 at the end (during the tests).

Keywords

EN

41.75.-i; 61.80.-x; 81.15.-z

Discipline

• 61.80.-x: Physical radiation effects, radiation damage(for photochemical reactions, see 82.50.-m; for effects of ionizing radiation on biological systems, see 87.53.-j)
• 81.15.-z: Methods of deposition of films and coatings; film growth and epitaxy(for structure of thin films, see 68.55.-a; see also 85.40.Sz Deposition technology in microelectronics; for epitaxial dielectric films, see 77.55.Px)
• 41.75.-i: Charged-particle beams

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 5
• Pages: 813-815

Dates

published

2013-05

Contributors

author

A. Pogrebnjak

• Sumy State University, R. Korsakov 2, 40007 Sumy, Ukraine

author

M. Prozorova

• Belgorod State University, Belgorod, Russia

author

M. Kovalyova

• Belgorod State University, Belgorod, Russia

author

O. Kolisnichenko

• Paton Welding Institute NAS of Ukraine, Kiev, Ukraine

author

V. Beresnev

• National Kharkov University, Kharkov, Ukraine

author

K. Oyoshi

• National Institute for Material Science, Tsukuba, Japan

author

Y. Takeda

• National Institute for Material Science, Tsukuba, Japan

author

A. Kaverina

• Sumy State University, R. Korsakov 2, 40007 Sumy, Ukraine

author

A. Shypylenko

• Sumy State University, R. Korsakov 2, 40007 Sumy, Ukraine

author

J. Partyka

• Lublin University of Technology, Nadbystrzycka 38a, 20-618 Lublin, Poland

References

• 1. J. Musil, J. Sklenka, R. Cerstvy, Surf. Coat. Technol. 125, 322 (2000)
• 2. A.D. Pogrebnjak, A.P. Shpak, N.A. Azarenkov, V.M. Beresnev, Usp. Fiz. Nauk 179, 35 (2009)
• 3. A.D. Pogrebnjak, A.G. Ponomarev, A.P. Shpak, Yu.A. Kunitskij, Usp. Fiz. Nauk 182, 287 (2012)
• 4. A.D. Pogrebnjak, M. Iljashenko, O.P. Kul'ment'eva, V.S. Kshnjakin, A.P. Kobzev, Y.N. Tyurin, O. Kolisnichenko, Vacuum 62, 21 (2001)
• 5. J. Musil, Surf. Coat. Technol. 206, 2105 (2012)
• 6. S. Veprek, J. Vac. Sci. Technol. A 17, 2401 (1999)
• 7. A.D. Pogrebnjak, A.G. Ponomarev, D.A. Kolesnikov, V.M. Beresnev, F.F. Komarov, M.V. Kaverin, S.S. Melnik, Tech. Phys. Lett. 38, 623 (2012)

Identifiers

DOI

10.12693/APhysPolA.123.813