Effects of Substrate Temperature on Structural Properties of Tin Oxide Films Produced by Plasma Oxidation after Thermal Evaporation

• Authors: M. Alaf , M. Guler , D. Gultekin , H. Akbulut
• Languages of publication: EN

Abstracts

EN

In this study, tin film was thermally evaporated onto a stainless steel substrate in an argon atmosphere. The tin films were then subjected to a DC plasma oxidation process using an oxygen/argon gas mixture. Three different substrate temperatures (100°C, 150°C, and 200°C) and three different oxygen partial pressures (12.5%, 25%, and 50%) were used to investigate the physical and microstructural properties of the films. The surface properties were studied by scanning electron microscopy, X-ray diffraction, atomic force microscopy and a four-point probe electrical resistivity measurement. The grain size and texture coefficient of the tin oxide films were calculated. Both SnO and SnO_2 films with grain sizes of 13-43 nm were produced, depending on the oxygen partial pressure. SnO films have flower- and flake-like nanostructures, and SnO_2 films have grape-like structures with nanograins. The resistivity values for the SnO_2 phase were found to be as low as 10^{-5} Ω cm and were observed to decrease with increasing substrate temperature.

Keywords

EN

64.70.fm; 73.61.At; 81.16.Pr

Discipline

• 81.16.Pr: Micro- and nano-oxidation(see also 82.37.Np Single molecule reaction kinetics)
• 64.70.fm: Thermodynamics studies of evaporation and condensation(for evaporation and condensation on surfaces, see 68.03.Fg)
• 73.61.At: Metal and metallic alloys

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 2
• Pages: 326-329

Dates

published

2013-02

Contributors

author

M. Alaf

• Sakarya University, Dept. of Metallurgical & Materials Engineering, 54187, Sakarya, Turkey

author

M. Guler

• Sakarya University, Dept. of Metallurgical & Materials Engineering, 54187, Sakarya, Turkey

author

D. Gultekin

• Sakarya University, Dept. of Metallurgical & Materials Engineering, 54187, Sakarya, Turkey

author

H. Akbulut

• Sakarya University, Dept. of Metallurgical & Materials Engineering, 54187, Sakarya, Turkey

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Identifiers

DOI

10.12693/APhysPolA.123.326