Scanning Ellipsometer Using a Fixed Phase Retarder and Rotating Polarizer and Analyzer

• Authors: S. Taya , T. El-Agez
• Languages of publication: EN

Abstracts

EN

A spectroscopic rotating polarizer-analyzer ellipsometer in which the polarizer and the analyzer rotate in opposite directions at the same speed and with a fixed retarder is proposed and investigated theoretically. The fixed phase retarder is introduced after the rotating polarizer to significantly reduce the percent error in the optical parameters.

Keywords

EN

07.60.Fs; 02.30.Nw

Discipline

• 02.30.Nw: Fourier analysis
• 07.60.Fs: Polarimeters and ellipsometers

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2013
• Volume: 123
• Issue: 2
• Pages: 183-184

Dates

published

2013-02

Contributors

author

S. Taya

• Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestine

author

T. El-Agez

• Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestine

References

• [1] D.E. Aspnes, Opt. Commun. 8, 222 (1973)
• [2] L.Y. Chen, D.W. Lynch, Appl. Opt. 26, 5221 (1987)
• [3] T.M. El-Agez, A.A. El Tayyan, S.A. Taya, Thin Solid Films 518, 5610 (2010)
• [4] T.M. El-Agez, S.A. Taya, Phys. Scr. 83, 025701 (2011)
• [5] T.M. El-Agez, S.A. Taya, A. El Tayayn, Int. J. Optomechatron. 5, 51 (2011)
• [6] T.M. El-Agez, D.M. Wieliczka, C. Moffitt, S.A. Taya, Phys. Scr. 84, 045302 (2011)
• [7] H. Fujiwara, Spectroscopic Ellipsometry Principles and Applications, Wiley, West Sussex, 2007

Identifiers

DOI

10.12693/APhysPolA.123.183