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2013 | 123 | 2 | 183-184
Article title

Scanning Ellipsometer Using a Fixed Phase Retarder and Rotating Polarizer and Analyzer

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Content
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EN
Abstracts
EN
A spectroscopic rotating polarizer-analyzer ellipsometer in which the polarizer and the analyzer rotate in opposite directions at the same speed and with a fixed retarder is proposed and investigated theoretically. The fixed phase retarder is introduced after the rotating polarizer to significantly reduce the percent error in the optical parameters.
Keywords
EN
Year
Volume
123
Issue
2
Pages
183-184
Physical description
Dates
published
2013-02
References
  • [1] D.E. Aspnes, Opt. Commun. 8, 222 (1973)
  • [2] L.Y. Chen, D.W. Lynch, Appl. Opt. 26, 5221 (1987)
  • [3] T.M. El-Agez, A.A. El Tayyan, S.A. Taya, Thin Solid Films 518, 5610 (2010)
  • [4] T.M. El-Agez, S.A. Taya, Phys. Scr. 83, 025701 (2011)
  • [5] T.M. El-Agez, S.A. Taya, A. El Tayayn, Int. J. Optomechatron. 5, 51 (2011)
  • [6] T.M. El-Agez, D.M. Wieliczka, C. Moffitt, S.A. Taya, Phys. Scr. 84, 045302 (2011)
  • [7] H. Fujiwara, Spectroscopic Ellipsometry Principles and Applications, Wiley, West Sussex, 2007
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv123n2006kz
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