Preferences help
enabled [disable] Abstract
Number of results
2013 | 123 | 1 | 73-75
Article title

Transport Coefficients in Mixtures Ar/H_2

Title variants
Languages of publication
In this work we present electron transport coefficients for electrons in Ar/H_2 mixtures for the conditions used in plasma assisted technologies for semiconductor production i.e. in moderate to very high reduced electric field E/N (E - electric field, N - gas density). We used a two term numerical solution of the Boltzmann equation at the lowest E/N and mean energies and also Monte Carlo simulation technique at moderate and high E/N. We show that a good agreement with experimental data exists for low and moderate E/N and that based on the tests for pure H_2 and Ar we can model properly the high E/N development. Results were obtained for abundances of H_2 from 1% to 50%. Such data are required to test the sets of cross-section data which are necessary in kinetic models for this mixture and also to produce transport coefficients for fluid models. Hydrogen is used for etching of organic compounds, most importantly low k dielectrics, at the same time argon as a buffer gas is added to control the mean energy and distribution function. Besides, operation at high E/N allows the generation of fast neutrals for charging free etching on nanometer scales.
  • Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia
  • Institute of Physics, University of Belgrade, POB 68, 11080 Belgrade, Serbia
  • [1] M. Miyauchi, Y. Miyoshi, Z.Lj. Petrović, T. Makabe, Solid-State Electron. 51, 1418 (2007)
  • [2] R.W. Crompton, Adv. At. Mol. Opt. Phys. 32, 97 (1994)
  • [3] W.L. Morgan, B.M. Penetrante, Comp. Phys. Commun. 58, 127 (1990)
  • [4] Z.Lj. Petrović, V.D. Stojanović, J. Vac. Sci. Technol. A 16, 329 (1998)
  • [5] Ž. Nikitović, V. Stojanović, J.P. Booth, Z.Lj. Petrović, Plasma Sources Sci. Technol. 18, 035008 (2009)
  • [6] S. Dujko, R.D. White, K.F. Ness, Z.Lj. Petrović, R.E. Robson, J. Phys. D, Appl. Phys. 39, 4788 (2006)
  • [7] V. Stojanović, Ž. Nikitović, Z. Petrović, Bul. Am. Phys. Soc. 56, FTP1 34 (2011)
  • [8] Z.Lj. Petrović, A.V. Phelps, Phys. Rev. E 80, 066401 (2009)
  • [9] A.G. Engelhardt, A.V. Phelps, Phys. Rev. 133, A375 (1962)
  • [10] J. Dutton, J. Phys. Chem. Ref. Data 4, 577 (1975)
  • [11] V.D. Stojanović, Ž.D. Nikitović, Z.Lj. Petrović, in: 7th General Conf. of the Balkan Physical Union, Book of Abstracts, Alexandroupolis (Greece), 2009, p. 65
  • [12] M. Hayashi, private communication, 1992
Document Type
Publication order reference
YADDA identifier
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.