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2012 | 122 | 6 | 1042-1044
Article title

Structure Dependent Conductivity of Ultrathin ZnO Films

Content
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Languages of publication
EN
Abstracts
EN
Zinc oxide films dedicated for hybrid organic/inorganic devices have been studied. The films were grown at low temperature (100°C, 130C and 200°C) required for deposition on thermally unstable organic substrates. ZnO layers were obtained in atomic layer deposition processes with very short purging times in order to shift a structure of the films from polycrystalline towards amorphous one. The correlation between atomic layer deposition growth parameters, a structural quality and electrical properties of ZnO films was determined.
Keywords
EN
Year
Volume
122
Issue
6
Pages
1042-1044
Physical description
Dates
published
2012-12
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv122n620kz
Identifiers
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