Title variants
Languages of publication
Abstracts
We present theoretically the characterization of 100 nm SiO_2 thin film using spectroscopic rotating polarizer analyzer ellipsometer in which the two elements are rotating synchronously in opposite directions with the same angular speed. The proposed sample consists of air (ambient)/SiO_2 (thin film)/Si (substrate). The ellipsometric parameters ψ and Δ are calculated when a clean signal is received by the detector and when a hypothetical noise is imposed on this signal. The film thickness and the optical constants of the film are calculated for the noisy signal in the spectrum range 200-800 nm. The results are compared with the proposed thickness and with the published values for SiO_2 optical constants.
Discipline
Journal
Year
Volume
Issue
Pages
15-19
Physical description
Dates
published
2012-07
received
2010-12-21
(unknown)
2012-02-22
Contributors
author
- Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority
author
- Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority
References
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv122n1p05kz