PL EN


Preferences help
enabled [disable] Abstract
Number of results
2012 | 122 | 1 | 15-19
Article title

Noise Effect on Thin Film Characterization Using Rotating Polarizer Analyzer Ellipsometer

Authors
Content
Title variants
Languages of publication
EN
Abstracts
EN
We present theoretically the characterization of 100 nm SiO_2 thin film using spectroscopic rotating polarizer analyzer ellipsometer in which the two elements are rotating synchronously in opposite directions with the same angular speed. The proposed sample consists of air (ambient)/SiO_2 (thin film)/Si (substrate). The ellipsometric parameters ψ and Δ are calculated when a clean signal is received by the detector and when a hypothetical noise is imposed on this signal. The film thickness and the optical constants of the film are calculated for the noisy signal in the spectrum range 200-800 nm. The results are compared with the proposed thickness and with the published values for SiO_2 optical constants.
Keywords
EN
Contributors
author
  • Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority
author
  • Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority
References
  • 1. R.M. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam 1977
  • 2. P.S. Hauge, Surf. Sci. 96, 108 (1980)
  • 3. J.A. Woollam, P.G. Snyder, M.C. Rost, Thin Solid Films 166, 317 (1988)
  • 4. K. Vedam, Thin Solid Films 313, 1 (1998)
  • 5. D.E. Aspnes, Thin Solid Films 455, 3 (2004)
  • 6. D.E. Aspnes, Opt. Commun. 8, 222 (1973)
  • 7. D.E. Aspnes, Appl. Opt. 4, 220 (1975)
  • 8. A.R. Zaghloul, R.M. Azzam, Surf. Sci. 96, 168 (1980)
  • 9. L. Vina, C. Umbatch, M. Cardona, L. Vodopyanov, Phys. Rev. B 29, 6752 (1984)
  • 10. L.Y. Chen, D.W. Lynch, Appl. Opt. 26, 5221 (1987)
  • 11. L.Y. Chen, X.W. Feng, Y. Su, H.Z. Ma, Y.H. Qian, Thin Solid Films 234, 385 (1993)
  • 12. L.Y. Chen, X.W. Feng, Y. Su, H.Z. Ma, Y.H. Qian, Appl. Opt. 33, 1299 (1994)
  • 13. C. Wijers, Appl. Phys. B 27, 5 (1982)
  • 14. R.M. Azzam, Opt. Commun. 25, 137 (1978)
  • 15. T.M. El-Agez, A.A. El Tayyan, S.A. Taya, Thin Solid Films 518, 5610 (2010)
  • 16. E.D. Palik, Handbook of Optical Constants of Solids, Academic Press, San Diego, CA 1985
  • 17. S. Samuel, Surf. Sci. 56, 97 (1976)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv122n1p05kz
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.