Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source

• Authors: P. Wachulak , A. Bartnik , H. Fiedorowicz , J. Kostecki
• Languages of publication: EN

Abstracts

EN

Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currently under development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emitting quasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUV transmission microscopy with a spatial (half-pitch) resolution of 50 nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.

Keywords

EN

52.38.Ph; 52.50.Dg; 41.50.+h; 42.30.Va; 42.79.Ci

Discipline

• 52.38.Ph: X-ray, γ-ray, and particle generation
• 42.30.Va: Image forming and processing
• 42.79.Ci: Filters, zone plates, and polarizers
• 52.50.Dg: Plasma sources
• 41.50.+h: X-ray beams and x-ray optics(see also 07.85.Fv X- and γ-ray sources, mirrors, gratings, and detectors in instruments)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2012
• Volume: 121
• Issue: 2
• Pages: 450-453

Dates

published

2012-02

Contributors

author

P. Wachulak

• Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland

author

A. Bartnik

• Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland

author

H. Fiedorowicz

• Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland

author

J. Kostecki

• Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland

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Identifiers

DOI

10.12693/APhysPolA.121.450