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2012 | 121 | 2 | 450-453
Article title

Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source

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EN
Abstracts
EN
Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currently under development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emitting quasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUV transmission microscopy with a spatial (half-pitch) resolution of 50 nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.
Keywords
Contributors
author
  • Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland
author
  • Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland
  • Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland
author
  • Institute of Optoelectronics, Military University of Technology, gen. S. Kaliskiego 2,00-908 Warsaw, Poland
References
  • [1] D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation, Cambridge University Press, Cambridge 1999
  • [2] P.A.C. Takman, H. Stollberg, G.A. Johansson, A. Holmberg, M. Lindblom, H.M. Hertz, J. Microsc. 226, 175 (2007)
  • [3] G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M.A. Larotonda, B.M. Luther, M.C. Marconi, J.J. Rocca, C.S. Menoni, Opt. Lett. 31, 1214 (2006)
  • [4] P.W. Wachulak, A. Bartnik, H. Fiedorowicz, Opt. Lett. 35, 2337 (2010)
  • [5] M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, T. Wilhein, Ultramicroscopy 102, 93 (2005)
  • [6] I.A. Artioukov, A.V. Vinogradov, V.E. Asadchikov, Y.S. Kasyanov, R.V. Serov, A.I. Fedorenko, V.V. Kondratenko, S.A. Yulin, Opt. Lett. 20, 2451 (1995)
  • [7] G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C.S. Menoni, M.C. Marconi, J.J. Rocca, W. Chao, J.A. Liddle, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artioukov, Y.P. Pershyn, V.V. Kondratenko, Opt. Lett. 30, 2095 (2005)
  • [8] F. Brizuela, Y. Wang, C.A. Brewer, F. Pedaci, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, P. Naulleau, P. Wachulak, M.C. Marconi, D.T. Attwood, J.J. Rocca, C.S. Menoni, Opt. Lett. 34, 27 (2009)
  • [9] L. Juschkin, R. Freiberger, K. Bergman, J. Phys., Conf. Ser. 186, 012030 (2009)
  • [10] H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, M. Szczurek, J. Alloys Comp. 401, 99 (2005)
  • [11] R. Rakowski, A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, J. Krzywiński, J. Mikołajczyk, L. Pina, L. Ryć, M. Szczurek, H. Ticha, P. Wachulak, Opt. Appl. 36, 4 (2006)
  • [12] P.W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, Z. Zawadzki, Appl. Phys. B 100, 461 (2010)
  • [13] R.L. Kelly, J. Phys. Chem. Ref. Data 16 supplement 1, 402 (1987)
  • [14] P.W. Wachulak, A. Bartnik, H. Fiedorowicz, J. Kostecki, Opt. Exp. 19, 9541 (2011)
  • [15] J.M. Heck, D.T. Attwood, W. Meyer-Ilse, E.H. Anderson, J. X-Ray Sci. Technol. 8, 95 (1998)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv121n262kz
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