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2012 | 121 | 1 | 172-174
Article title

Effect of the Plasma Deposition Parameters on the Properties of Ti/TiC Multilayers for Hard Coatings Applications

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EN
Abstracts
EN
Titanium carbide (TiC) hard coatings have been obtained on steel and silicon substrates by rf magnetron sputtering process. Two layer coatings have been deposited in order to improve adhesion on steel. The lower layer was titanium metal and the upper TiC layer was obtained by reactive sputtering of the titanium target in Ar and methane gas mixture. The study confirmed that the TiC layer composition depends on the reactive sputtering gas composition and substrate bias voltage. Film microhardness was measured by microindentation. Measurement results showed that the hardness coating depends on the microstructure of our coatings and the polarization of bias substrate is an important parameter to control the microstructure.
Keywords
Contributors
author
  • Plasma Discharges Group, DMIL, CDTA, P.O. Box 17, Baba hassen, Algiers, Algeria
author
  • Plasma Discharges Group, DMIL, CDTA, P.O. Box 17, Baba hassen, Algiers, Algeria
author
  • LECTCM, USTHB, P.O. Box 32, El Alia, BabEzzouar, Algiers, Algeria
  • Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa
author
  • Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa
author
  • Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa
References
  • 1. A. Mani, P. Aubert, F. Mercier, H. Khodja, C. Berthierd, P. Houdy, Surf. Coat. Technol. 194, 190 (2005)
  • 2. D. Nilsson, F. Svahn, U. Wiklund, S. Högmark, Wear 254, 1084 (2003)
  • 3. W. Wu, J. Ting, Thin Solid Films 420, 166 (2002)
  • 4. D. Martinez-Martinez, C. Lopez-Cartes, A. Justo, A. Garcia-Luis, M. Brizuela, J.I. Onate, J. Vac. Sci. Technol. A 23, 1732 (2005)
  • 5. A.A. El Mel, E. Gautron, C.H. Choi, B. Angleraud, A. Granier, P.Y. Tessier, Nanotechnology 21, 5603 (2010)
  • 6. L.I. Svistun, T.M. Pavlygo, D.V. Dmitrenko, Russian Metallurgy (Metally) 2009, 237 (2009)
  • 7. M. Antonov, I. Hussainova, J. Pirso, K. Juhani, M. Viljus, Estonian J. Eng. 16, 264 (2010)
  • 8. L.E. Toth, Transition Metal Carbides and Nitrides, Academic Press, New York 1971
  • 9. S.T. Oyama, The Chemistry of Transition Metal Carbide and Nitrides, Blackie Academic and Professional, London 1996
  • 10. H.O. Pierson, Mater. Manuf. Proc. 8, 519 (1993)
  • 11. N. Saoula, K. Henda, R. Kesri, AIP Conf. Proc. 1047, 256 (2008)
  • 12. N. Saoula, K. Henda, R. Kesri, Mater. Sci. Forum 609, 117 (2009)
  • 13. T. Sonoda, S. Kotake, A. Watazu, K. Katou, T. Asahina, Sil. Ind. Special Issue 69, 173 2005
  • 14. N. Saoula, K. Henda, R. Kesri, Adv. Mater. Res. 227, 156 (2011)
  • 15. G. Lemperiere, J.M. Poitevin, Thin Solid Films 111, 339 (1984)
  • 16. L.J. Meng, M.P. Dos Santos, Surf. Coat. Technol. 90, 64 (1997)
  • 17. L.F. Senna, C.A. Achete, T. Hirsh, F.L. Freire Jr, Surf. Coat. Technol. 94-95, 390 (1997)
  • 18. T.W. Kang, C.Y. Hong, C.K. Chung, T.W. Kim, Thin Solid Films 342, 184 (1999)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv121n152kz
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