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2011 | 120 | 6A | A-58-A-60
Article title

The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition

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Languages of publication
EN
Abstracts
EN
In this work, we explored the influence of the low growth temperatures on the structural and optical properties of AlN films grown by plasma enhanced atomic layer deposition using trimethylaluminum and ammonia (NH_3) plasma. Structural and optical results show that AlN films grown by self-limited plasma enhanced atomic layer deposition are polycrystalline at temperatures as low as 100C.
Keywords
EN
Year
Volume
120
Issue
6A
Pages
A-58-A-60
Physical description
Dates
published
2011-12
References
  • [1] E.F. McCullen, J.S. Thakur, Y.V. Danylyuk, G.W. Auner, L.W. Rosenberger, J. Appl. Phys. 103, 063504 (2008)
  • [2] Y. Lee, S. Kang, Thin Solid Films 446, 227 (2004)
  • [3] J. Khoshman, M.E. Kordesch, J. Non-Cryst. Solids 351, 3334 (2005)
  • [4] D. Riihela, M. Ritala, R. Matero, M. Leskela, J. Jokinen, P. Haussalo, Chem. Vap. Dep. 2, 277 (1996)
  • [5] H. Kim, J. Vac. Sci. Technol. A 21, 2231 (2003)
  • [6] M. Rittala, M. Leskela, in: Hand Book of Thin Film Materials, Ed. H.S. Nalwa, Academic Press, New York 2002, p. 103
  • [7] K. Kim, N. Kwak, S. Lee, Electr. Mater. Lett. 5, 83 (2009)
  • [8] M. Bosund, T. Sajavaara, M. Laitinen, T. Huhtio, M. Putkonen, V.M. Airaksinen, H. Lipsanen, Appl. Surf. Sci. 257, 7827 (2011)
  • [9] X. Liu, S. Ramanathan, E. Lee, T.E. Seidel, Mater. Res. Soc. Symp. Proc. 811, 11 (2004)
  • [10] L. Rosenberger, R. Baird, E. McCullen, E. Auner, G. Shreve, Surf. Interface Anal. 40, 1254 (2008)
  • [11] S. Schoser, G. Brauchle, J. Forget, K. Kohlhof, T. Weber, J. Voigt, B. Rauschenbach, Surf. Coat. Technol. 103-104, 222 (1998)
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n6ap17kz
Identifiers
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