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Number of results
2011 | 120 | 6A | A-37-A-39

Article title

Substrate Temperature Influenced Structural and Electrical Behaviour of~RF Magnetron Sputtered Ag_2Cu_2O_3 Films

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EN

Abstracts

EN
Ag_2Cu_2O_3 films were deposited on glass and silicon substrates by RF magnetron sputtering of metallic equimolar (Ag_{50}Cu_{50}) alloy target in Ar-O_{2} mixture at different substrate temperature (T_{s}) ranging between 303 and 523 K. The effect of T_{s} on the core level binding energies, structural and electrical properties of the films was systematically studied. The films deposited at room temperature were amorphous. The films deposited at 373 K were polycrystalline and the crystallinity was increased when the T_{s} was increased to 423 K. The films deposited at 423 K and subsequently annealed at 498 K exhibits single phase Ag_2Cu_2O_3. In the case of films deposited at higher T_{s} of 523 K, Ag_2O was decomposed into Ag. The electrical resistivity of the films deposited at 303 K was 1.2 × 10^{-5} Ω cm, whereas the films formed at 423 K and subsequently annealed at 498 K showed electrical resistivity of 2.2 × 10^{-3} Ω cm due to improvement in the crystallinity of single phase Ag_2Cu_2O_3.

Keywords

Contributors

author
  • Department of Physics, Sri Venkateswara University, Tirupati - 517 502, India
  • Department of Physics, Sri Venkateswara University, Tirupati - 517 502, India
author
  • Department of Physics, Sri Venkateswara University, Tirupati - 517 502, India
author
  • CENIMAT/I3N, Departamento de Ciencia dos Materiais, Faculdade de Ciencias e Tecnologia, FCT, Universidade Nova de Lisboa and CEMOP-UNINOVA, 2829-516 Caparica, Portugal
author
  • CENIMAT/I3N, Departamento de Ciencia dos Materiais, Faculdade de Ciencias e Tecnologia, FCT, Universidade Nova de Lisboa and CEMOP-UNINOVA, 2829-516 Caparica, Portugal
author
  • Institut Jean Lamour (UMR CNRS 7198), Department CP2S, Ecole des Mines, Nancy Université, 54042 Nancy cedex, France

References

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Document Type

Publication order reference

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YADDA identifier

bwmeta1.element.bwnjournal-article-appv120n6ap10kz
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