PL EN


Preferences help
enabled [disable] Abstract
Number of results
2011 | 120 | 6A | A-34-A-36
Article title

(Zn,Cu)O Films by Atomic Layer Deposition - Structural, Optical and Electric Properties

Content
Title variants
Languages of publication
EN
Abstracts
EN
ZnCuO thin films have been deposited on silicon, glass and quartz substrates by atomic layer deposition method, using reactive organic precursors of zinc and copper. As zinc and copper precursors we applied diethylzinc and copper(II) acetyloacetonate. Structural, electrical and optical properties of the obtained ZnCuO layers are discussed based on the results of scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, atomic force microscopy, the Hall effect and photoluminescence investigations.
Keywords
Year
Volume
120
Issue
6A
Pages
A-34-A-36
Physical description
Dates
published
2011-12
References
  • [1] U. Ozgur, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho, H. Morkoc, J. Appl. Phys. 98, 041301 (2005)
  • [2] T. Dietl, H. Ohno, F. Matsukura, J. Cibert, D. Ferrand, Science 287, 1019 (2000)
  • [3] C. Sudakar, J.S. Thakur, G. Lawes, R. Naik, V.M. Naik, Phys. Rev. B 75, 054423 (2007)
  • [4] D. Chakraborti, J. Narayan, J.T. Prater, Appl. Phys. Lett. 90, 062504 (2007)
  • [5] D.B. Buchholz, R.P.E. Chang, J.H. Song, J.B. Ketterson, Appl. Phys. Lett. 87, 082504 (2005)
  • [6] M.I. Łukasiewicz, B. Witkowski, M. Godlewski, E. Guziewicz, M. Sawicki, W. Paszkowicz, R. Jakieła, T.A. Krajewski, G. Łuka, Phys. Status Solidi B 247, 1666 (2010)
  • [7] M. Łukasiewicz, A. Wójcik, M. Godlewski, E. Guziewicz, R. Jakieła, M. Kiecana, M. Sawicki, Acta Phys. Pol. A 114, 1235 (2008)
  • [8] H.-T. Lin, T.-S. Chin, J.-C. Shih, S.-H. Lin, T.-M. Hong, R.-T. Huang, F.-R. Chen, J.-J. Kai, Appl. Phys. Lett. 85, 621 (2004)
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n6ap09kz
Identifiers
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.