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2011 | 120 | 6A | A-34-A-36
Article title

(Zn,Cu)O Films by Atomic Layer Deposition - Structural, Optical and Electric Properties

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EN
Abstracts
EN
ZnCuO thin films have been deposited on silicon, glass and quartz substrates by atomic layer deposition method, using reactive organic precursors of zinc and copper. As zinc and copper precursors we applied diethylzinc and copper(II) acetyloacetonate. Structural, electrical and optical properties of the obtained ZnCuO layers are discussed based on the results of scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, atomic force microscopy, the Hall effect and photoluminescence investigations.
Keywords
Contributors
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
  • Dept. of Mathematics and Natural Sciences College of Science, Cardinal S. Wyszyński University, Dewajtis 5, 01-815 Warsaw, Poland
References
  • [1] U. Ozgur, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho, H. Morkoc, J. Appl. Phys. 98, 041301 (2005)
  • [2] T. Dietl, H. Ohno, F. Matsukura, J. Cibert, D. Ferrand, Science 287, 1019 (2000)
  • [3] C. Sudakar, J.S. Thakur, G. Lawes, R. Naik, V.M. Naik, Phys. Rev. B 75, 054423 (2007)
  • [4] D. Chakraborti, J. Narayan, J.T. Prater, Appl. Phys. Lett. 90, 062504 (2007)
  • [5] D.B. Buchholz, R.P.E. Chang, J.H. Song, J.B. Ketterson, Appl. Phys. Lett. 87, 082504 (2005)
  • [6] M.I. Łukasiewicz, B. Witkowski, M. Godlewski, E. Guziewicz, M. Sawicki, W. Paszkowicz, R. Jakieła, T.A. Krajewski, G. Łuka, Phys. Status Solidi B 247, 1666 (2010)
  • [7] M. Łukasiewicz, A. Wójcik, M. Godlewski, E. Guziewicz, R. Jakieła, M. Kiecana, M. Sawicki, Acta Phys. Pol. A 114, 1235 (2008)
  • [8] H.-T. Lin, T.-S. Chin, J.-C. Shih, S.-H. Lin, T.-M. Hong, R.-T. Huang, F.-R. Chen, J.-J. Kai, Appl. Phys. Lett. 85, 621 (2004)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n6ap09kz
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