Detection of Shallow Dislocations on 4H-SiC Substrate by Etching Method

• Authors: Y. Ishikawa , Y. Yao , K. Sato , Y. Sugawara , K. Danno , H. Suzuki , T. Bessho , Y. Kawai , N. Shibata
• Languages of publication: EN

Abstracts

EN

Correlation between dislocation types in epitaxial 4H-SiC and etch pit types on the 4H-SiC wafer surface were investigated by etch pit method and transmission electron microscope. Shallow dislocation on the wafer was found to form round pit without core. The shallow dislocation was estimated half-loop type in wafer and this estimation explains that step-flow growth converts half-loop dislocation into complex dislocation composed by threading dislocation and basal plane dislocation.

Keywords

EN

61.72.uj; 81.65.Cf; 68.37.Lp

Discipline

• 68.37.Lp: Transmission electron microscopy (TEM)
• 61.72.uj: III-V and II-VI semiconductors
• 81.65.Cf: Surface cleaning, etching, patterning(see also 52.77.Bn Etching and cleaning in physics of plasmas)

• Journal: Acta Physica Polonica A
• Year: 2011
• Volume: 120
• Issue: 6A
• Pages: A-25-A-27

Dates

published

2011-12

Contributors

author

Y. Ishikawa

• Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan

author

Y. Yao

• Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan

author

K. Sato

• Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan

author

Y. Sugawara

• Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan

author

K. Danno

• Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka 410-1193, Japan

author

H. Suzuki

• Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka 410-1193, Japan

author

T. Bessho

• Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka 410-1193, Japan

author

Y. Kawai

• Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka 410-1193, Japan

author

N. Shibata

• Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan

References

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Identifiers

DOI

10.12693/APhysPolA.120.A-25