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We report on a two-step etching of ZnTe based micropillars. We demonstrate applicability of the technology and we analyze the optical properties of obtained structures. Microphotoluminescence spectra of individual micropillars show a typical mode pattern that confirms a successful growth of photonic structures. The reflectivity and photoluminescence spectra of a planar microcavity measured for various incident angles show that additional side distributed Bragg reflectors will be important for the further enhancement of photon confinement in micropillar cavity.
Institute of Solid State Physics, University of Bremen, Postfach 330 440, D-28334 Bremen, Germany
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