Analysis of Non-Steady Stage in SAW Gas Sensors with Semiconducting Sensor Layers

• Authors: M. Urbańczyk , T. Hejczyk
• Languages of publication: EN

Abstracts

EN

The profile of the gas concentration in the sensor layer can be expressed as a polynomial function involving the diffusion coefficient (D_{K}), semiconductor film thickness (h), rate constant (k), gas concentration outside the semiconductor film (C_{S}). Before reaching a steady state of the concentration profile, its behavior depends on a few factors as the distance from the piezoelectric surface, the rate constant, the thickness of the layer and the diffusion constant and time. We are going to simulate temporary processes in the semiconductor sensor film in the surface acoustic wave gas sensor system and to describe the influence on relative changes of the surface acoustic wave velocity. The numerical results basing on the code written in Pyton, are described and analyzed.

Keywords

EN

07.07.Df; 43.25.Fe; 68.35.Iv; 77.65.Dq

Discipline

• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 68.35.Iv: Acoustical properties

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2011
• Volume: 120
• Issue: 4
• Pages: 789-793

Dates

published

2011-10

Contributors

author

M. Urbańczyk

• Faculty of Electrical Engineering, Silesian University of Technology, B. Krzywoustego 2, 44-100 Gliwice, Poland

author

T. Hejczyk

• ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.120.789