Title variants
Languages of publication
Abstracts
In the paper a new sensor structure for surface acoustic wave gas system is presented. A bilayer structure WO_3-Pd thin films may be useful for hydrogen detection in low concentration in air. A bilayer sensor structure of tungsten oxide WO_3 with a very thin catalytic film of palladium on the top has been studied for gas-sensing application at room temperature (about 25°C) in surface acoustic wave system. The bilayer structure of WO_3 layers with a thickness of about 50 nm, 100 nm and 150 nm was made onto a LiNbO_3 Y-cut Z-propagating substrate by means of the vacuum sublimation method using a special aluminum mask. The vapor source consisted of commercially available WO_3 powder (Fluka 99.9%) and molybdenum heater. The thin palladium (Pd) layer (about 10 nm) was made separately on each WO_3 layer by means of vapor deposition in high vacuum. There have been investigated three structures: 50 nm WO_3 + 10 nm Pd, 100 nm WO_3 + 10 nm Pd and 150 nm WO_3 + 10 nm Pd in three canal surface acoustic wave system with reference oscillator. Numerical results obtained by analysis of the surface acoustic wave gas sensor model have been compared with experimental results.
Discipline
- 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
- 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- 68.35.Iv: Acoustical properties
Journal
Year
Volume
Issue
Pages
616-620
Physical description
Dates
published
2011-10
Contributors
author
- ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland
author
- Faculty of Electrical Engineering, Silesian University of Technology, B. Krzywoustego 2, 44-100 Gliwice, Poland
References
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n411kz