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2011 | 120 | 4 | 616-620
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WO_3-Pd Structure in SAW Sensor for Hydrogen Detection

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In the paper a new sensor structure for surface acoustic wave gas system is presented. A bilayer structure WO_3-Pd thin films may be useful for hydrogen detection in low concentration in air. A bilayer sensor structure of tungsten oxide WO_3 with a very thin catalytic film of palladium on the top has been studied for gas-sensing application at room temperature (about 25°C) in surface acoustic wave system. The bilayer structure of WO_3 layers with a thickness of about 50 nm, 100 nm and 150 nm was made onto a LiNbO_3 Y-cut Z-propagating substrate by means of the vacuum sublimation method using a special aluminum mask. The vapor source consisted of commercially available WO_3 powder (Fluka 99.9%) and molybdenum heater. The thin palladium (Pd) layer (about 10 nm) was made separately on each WO_3 layer by means of vapor deposition in high vacuum. There have been investigated three structures: 50 nm WO_3 + 10 nm Pd, 100 nm WO_3 + 10 nm Pd and 150 nm WO_3 + 10 nm Pd in three canal surface acoustic wave system with reference oscillator. Numerical results obtained by analysis of the surface acoustic wave gas sensor model have been compared with experimental results.
  • ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland
  • Faculty of Electrical Engineering, Silesian University of Technology, B. Krzywoustego 2, 44-100 Gliwice, Poland
  • 1. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1148 (2010)
  • 2. M. Penza, G. Cassano, P. Aversa, A. Cusano, M. Consales, M. Giordano, L. Nicolais, IEEE Sensors J. 6, 867 (2006)
  • 3. M. Penza, P. Aversa, G. Cassano, W. Wlodarski, K. Kalantar-Zadeh, Sensors Actuators B 127, 168 (2007)
  • 4. W. Jakubik, M. Urbańczyk, S. Kochowski, J. Bodzenta, Sensors Actuators B 82, 265 (2002)
  • 5. W. Jakubik, M. Urbańczyk, E. Maciak, in: XX Eurosensors, Ed. P. Enokssen, University of Goeteborg, Goeteborg 2006, Vol. 1, Goeteborg, 2006, p. 124
  • 6. D. Amico, A. Palma, E. Verona, in: IEEE Ultrason. Symp., Vol. 1, 1982, p. 308
  • 7. A. Venema, E. Nieuwkoop, M.J. Vellekoop, W. Ghijsen, A. Barendsz, M.S. Nieuwenhuizen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control UFFC-34, 148 (1987)
  • 8. T. Pustelny, E. Maciak, Z. Opilski, M. Bednorz, Opt. Appl. 37, 187 (2007)
  • 9. W. Jakubik, Sensors Actuators B 96, 321 (2003)
  • 10. B.A. Auld, Acoustic Fields and Waves, Vol. 2, Wiley, New York 1973
  • 11. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1153 (2010)
  • 12. S. Gordon, A. Kino, IEEE Trans. Electron Dev. ED-18, 347 (1971)
  • 13. G. Sakai, N. Matsunaga, E. Shimanoe, N. Yamazone, Sensors Actuators B 80, 125 (2001)
  • 14. B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
  • 15. T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A183 (2003)
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