SPM Characterization of Titanium Disilicide Nanostructures Grown on a Ni-Modified Si(100) Substrate

• Authors: W. Koczorowski , M. Bazarnik , R. Czajka
• Languages of publication: EN

Abstracts

EN

The paper presents our recent investigations of the early stage growth of titanium silicides on a modified Si(100) substrate. The substrate was modified by deposition of a minute amount of Ni atoms, and the subsequent flash annealing. This process led to the creation of parallel defect lines on the Si(100) surface. We expected TiSi_2 to form elongated structures on top and/or between the defect lines. Though this idea failed, stable nanostructures were observed and characterized using scanning probe microscopy (scanning tunneling microscopy and atomic force microscopy) methods.

Keywords

EN

68.37.Ef; 68.37.Ps

Discipline

• 68.37.Ef: Scanning tunneling microscopy (including chemistry induced with STM)
• 68.37.Ps: Atomic force microscopy (AFM)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2011
• Volume: 120
• Issue: 3
• Pages: 480-484

Dates

published

2011-09

received

2010-12-13

(unknown)

2011-03-15

Contributors

author

W. Koczorowski

• Institute of Physics, Poznań University of Technology, Nieszawska 13A, 60-965 Poznań, Poland

author

M. Bazarnik

• Institute of Physics, Poznań University of Technology, Nieszawska 13A, 60-965 Poznań, Poland

author

R. Czajka

• Institute of Physics, Poznań University of Technology, Nieszawska 13A, 60-965 Poznań, Poland

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Identifiers

DOI

10.12693/APhysPolA.120.480